基于MEMS工艺的新型高线性压力传感器设计  

Design of a Novel High-linear Pressure Sensor Based on MEMS Fabrication

作　　者：胡智文[1] 

机构地区：[1]浙江传媒学院新媒体学院,浙江杭州310018

出　　处：《微电子学与计算机》2015年第9期114-118,123,共6页Microelectronics & Computer

基　　金：浙江省自然科学基金项目(LY13F010006)

摘　　要：基于 MEMS 工艺，提出了一种球冠形底部固定极板与复合膜可动上极板结合的电容式微机械压力传感器。改变了经典的上下电极接触过程，并增加了深刻蚀工艺附加深孔结构，使传感器几乎完全工作在线性区间。针对其量程，分析了复合膜厚度对极板接触状态及线性度的影响，并利用有限元分析法对结构进行了模拟与验证，最后给出了工艺流程说明。该方案可为工作于100~800 kPa 的汽车胎压监控（TPMS）提供一种新的传感器实现方式。A MEMS capacitive micromechanical pressure sensor with high linearity is presented,which is based on a fixed spherical cap electrode and a multiple membrane.In this device,the touch process of electrodes starts at the beginning of measuring range,and a structure of hole made by DRIE is added.The novel device can enable a good linearity during the whole measuring range.The analysis of membrane thickness to touch status and linearity is performed,so that the novel structure is verified to be effective.Furthermore,the fabrication process of this device is proposed and introduced.This high-linear micromechanical pressure sensor can provide a good choice to tire pressure monitoring system （TPMS）,which will work at the press range of 100 kPa to 800 kPa.

关 键 词：MEMS 工艺 接触式 压力传感器 复合膜 高线性度 

分 类 号：TN302[电子电信—物理电子学]