大面积硫化锌窗口红外保护膜设计与制备  

Design and Deposition of Infrared Protective Coatings on Large Area ZnS Window

作　　者：何光宗[1] 贺芳 熊长新[1] 韩放[1] 王航[1] 张天行[1] 

机构地区：[1]华中光电技术研究所-武汉光电国家实验室,湖北武汉430223 [2]中国兵器工业新技术推广研究所,北京100089

出　　处：《光学与光电技术》2015年第5期71-74,共4页Optics & Optoelectronic Technology

摘　　要：硫化锌是重要的大尺寸红外光学窗口材料之一。根据硫化锌材料的工艺特性,采用了"减反过渡层+类金刚石膜"的复合结构,对膜系的光学性能进行了优化设计。采用离子束辅助蒸发和化学气相沉积的复合工艺在大面积的硫化锌基底上沉积了红外保护膜。分别采用红外光谱仪及纳米压入仪测试了样品的红外透过率及硬度。结果表明:该薄膜样品硬度较高,且在中波及长波红外波段均具有较高的透过率。大面积硫化锌窗口红外保护膜样品通过了GJB2485规定的环境适应性测试。Zinc sulfide is an important infrared material for large area window or dome. Compound structure of antireflective bonding layer and DLC layer was designed on zinc sulfide substrates by using matching layers. And the compounded IR protective coatings was deposited on to large area zinc sulfide substrate by using ion assisted deposition and chemical vapor deposition process. The infrared transmission and hardness was investigated by FTIR spectrometer and nano-indentation. Such protctive coatings has high transmission and hardness and passed the GJB2485 environment testing for windows protection coatings.

关 键 词：红外保护膜 大面积硫化锌窗口 离子束蒸发 化学气相沉积 环境适应性 

分 类 号：TN213[电子电信—物理电子学]