硅基纳米光波导微腔全光开关新进展  

Silicon-based nanowaveguide microcavity all-optical switches——a research breakthrough

作　　者：李淳飞[1] 

机构地区：[1]哈尔滨工业大学理学院物理系,哈尔滨150001

出　　处：《物理》2015年第12期803-809,共7页Physics

摘　　要：全光开关研究已有50年历史,至今尚未全面达到实用开关器件所要求的技术指标。近几年来基于SOI材料(做在绝缘层上的硅材料)、工作在光通信波长、采用成熟CMOS工艺(互补金属氧化物半导体工艺)的硅基纳米波导微腔结构全光开关已成为国际科学界的研究热点,大大推进了全光开关的实用化。文章介绍了国际上近十年研究硅基纳米波导微腔全光开关的5种典型方案,包括脊形和槽形纳米光波导;环腔和F-P腔两种微腔结构;纳米光波导、光子晶体、表面等离子体激元三种工作原理。分析总结了它们的共同特点和值得借鉴的研究经验,以便推动国内相关研究工作的开展。All-optical switches have been studied for 40 years,but still do not fully meet the technical requirements for practical optical switching devices.In recent years there has been much interest in all-optical switches with silicon-based nanowaveguide microcavity,fabricated from silicon-on-insulator materials through mature CMOS processes,working at optical communication wavelength;this has greatly promoted the development of practical all-optical switches.This paper will review five types of these switches,including the ridge and groove nanowaveguide types,the ring resonator and FP cavity microcavity types,as well as the working principle of optical nanowaveguide,photonic crystal,and surface plasmon.Their common characteristics and results of past investigations are analyzed and summarized,in the hope of promoting future research in this field in China.

关 键 词：全光开关 非线性光学 SOI材料 纳米光波导 微腔 CMOS工艺 

分 类 号：TN252[电子电信—物理电子学]