用于Lamé模态方块谐振器的压控电流源模型  

A Voltage-Controlled-Current-Source Model for Lamé-Mode Square Plate Resonators

作　　者：梁冰[1] 宋亚梅[1] 鲍景富[1] 李昕熠[1] 

机构地区：[1]电子科技大学电子工程学院,成都611731

出　　处：《微纳电子技术》2015年第12期770-778,共9页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(11176006)

摘　　要：提出了一种可以用于Lamé模态方块微机械谐振器的压控电流源模型。推导了器件的电气参数以建立电路模型。模型中还加入了一个压控调谐电容来描述谐振器的频率非线性特性。该电容值和模型中的其他参数既可以通过理论计算也可以通过不同方法实验得到。为了证实该模型,采用SOIMUMPs工艺制备了一个频率为9.45 MHz并且包含T型支撑梁结构的绝缘体上硅工艺谐振器,并且在0.015 mTorr(1 Torr=133.322 Pa)真空环境下完成器件的测试。理论计算和实验结果之间参数的最大偏差为18%,该偏差是在60 V偏置电压下得到的,因此该模型的精确性比较高。A voltage-controlled-current-source（VCCS）circuit model for Lamé-mode square plate MEMS resonators was presented.The electrical parameters were derived to build the circuit model.A voltage-controlled tuning capacitor was also included in the circuit to describe the frequency nonlinearity characteristic of the resonator.The capacitor value and other parameters in the model were theoretically calculated and measured using different methods.To verify this model,a9.45 MHz silicon-on-insulator（SOI）resonator with T-shaped anchor beam was fabricated using the SOIMUMPs process and experimentally measured at a vacuum pressure of 0.015 mTorr（1 Torr=133.322 Pa）.A maximum difference of the parameters between the theoretical calculation and experimental result is 18%at the bias voltage of 60 V,thus the accuracy of the model is higher.

关 键 词：压控电容 压控电流源(VCCS)模型 非线性 微机械谐振器 等效参数 

分 类 号：TH703[机械工程—仪器科学与技术] TN602[机械工程—精密仪器及机械]