长条形扫描反射镜的柔性支撑  

Long type scanning mirror with flexible supporting

作　　者：张雷[1] 丁亚林[1] 徐正平[1] 张洪文[1] 张健[1] 郭万存[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《红外与激光工程》2015年第12期3678-3683,共6页Infrared and Laser Engineering

基　　金：国家高技术研究发展计划(2010AA010102)

摘　　要：为适应复杂的工作环境,提高反射镜的面形精度,设计了基于柔性支撑的RB-Si C材料长条形扫描反射镜。采用三角形单元和四边形单元相结合的背部开放式结构,对扫描反射镜进行了轻量化设计;通过分析支撑点跨距对反射镜变形的影响,对支撑点位置进行了优化设计;设计了万向柔性支撑的结构形式,消除装调和环境变化产生的残余应力;利用有限单元法建立了扫描反射镜组件的模型,计算后面形精度可达到0.023λ;采用自准值法,利用Zy Go干涉仪对反射镜的面形精度进行了测量,测量结果显示扫描反射镜的面形RMS值达到0.029λ。通过模拟无穷远处动静态目标进行了静动态成像试验,成像质量一致,通过飞行试验对地面目标进行了拍摄,扫描反射镜动态成像稳定,所获得的图像质量良好。A scanning mirror with the material RB-SiC was designed based on the flexible support, which could operate in complex environment and the reflection mirror＇s surface precision was enhanced. A lightweight design was conducted on the scanning mirror in the way of combining the triangular elements and quadrilateral elements on the back-open-architecture; The locations of supporting were optimized by analyzing the impaction of supporting span on the deformation of mirror. Meanwhile, the universal-flexible support structure was designed to eliminate stress during alignment process and alteration of environment. The finite element model of the scanning mirror component was established, and the surface precision could be 0.023）t according to the calculation; The mirror＇s surface precision was measured by the ZyGo interferometer with the method of autocollimation after calculation, and the RMS was 0.029A. The static and dynamic imaging tests were compared through the simulation of the infinite distance target, and the results show the image quality meets well. The imaging stability of the scanning mirror performs well after flight test of imaging the target on ground, the result shows that the photograph performs well.

关 键 词：扫描反射镜 轻量化 柔性支撑 RB-SIC 面形精度 

分 类 号：V19[航空宇航科学与技术—人机与环境工程]