LTCC集成电阻的精细控制  

The Tight Control of Tolerance of LTCC Resistor

作　　者：贾少雄 李俊[1] 黄旭兰[1] 杨伟[1] 王亮[1] 

机构地区：[1]中国电子科技集团公司第二研究所,太原030024

出　　处：《电子与封装》2015年第12期30-33,37,共5页Electronics & Packaging

摘　　要：低温共烧陶瓷(Low Temperature Co-fire Ceramic——LTCC)技术,具有可集成无源电阻的独特优势。LTCC基板集成电阻主要有两种方式,表层电阻和内埋电阻。主要讨论了LTCC基板内埋电阻的制备工艺。针对不同的电阻材料,设计了不同工艺。最终为不同电阻的制备提出了一种优化的工艺,使得LTCC内埋电阻的精度控制范围可达到±17%。Low Temperature Co-fire Ceramic（LTCC） technology offers a unique advantage in passive components. The integral resistors in LTCC include surface resistors and embedded resistors. In this study the processing of embedded resistors in LTCC substrates have been discussed. The experimental work has been made with different types of resistor material. By optimizing the processing, the embedded resistance tolerances smaller than ±17% were achieved.

关 键 词：LTCC 内埋电阻 印刷工艺 精度 

分 类 号：TN305[电子电信—物理电子学]