压阻式高固有频率Z轴加速度敏感结构  

Piezoresistive Z-Axis Acceleration Sensitive Structure with High Natural Frequency

作　　者：揣荣岩[1] 代全[1] 王健[1] 梁峭[2] 衣畅 

机构地区：[1]沈阳工业大学信息科学与工程学院,辽宁沈阳110870 [2]沈阳仪表科学研究院有限公司,辽宁沈阳110043

出　　处：《仪表技术与传感器》2015年第9期4-7,共4页Instrument Technique and Sensor

基　　金：国家自然科学基金资助项目(61372019)

摘　　要：基于微机电系统(MEMS)技术的加速度传感器因其性价比高、易于集成化而得到广泛应用,但在普通MEMS加速度敏感结构中仍然存在灵敏度和固有频率相互制约的弱点。为此,文中优化设计了一种压阻式新型加速度敏感结构,该结构在弹性梁加质量块的基本结构上引入了敏感微梁,在保证高灵敏度的同时,显著提高了固有频率。其灵敏度与固有频率的乘积可比普通MEMS加速度计提高25倍以上。Acceleration sensors based on Micro-Electro-Mechanical System（MEMS） technology have been widely applied due to their high cost-performance ratio and easy integration,but there is still weakness of mutual constraint between sensitivity and natural frequency.For this reason,a new type of piezoresistive acceleration sensitive structure was designed in this paper.Based on a basic structure with elastic beam and mass,a sensitive micro-beam was introduced to form the new structure,which shows extremely high natural frequency and high sensitivity.The product value of sensitivity and natural frequency of the new structure is 25 times lager than normal MEMS acceleration sensors.

关 键 词：加速度传感器 压阻式 高固有频率 微梁 多晶硅纳米膜 MEMS 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]