掺铂和电子辐照对快恢复二极管性能的影响  

Influence of Platinum Diffusion Electron Irradiation on Performance of FRDs

作　　者：赵豹[1] 贾云鹏[1] 吴郁[1] 胡冬青[1] 周璇[1] 李哲[1] 谭健[1] 

机构地区：[1]北京工业大学电子信息与控制工程学院,北京100124

出　　处：《半导体技术》2016年第1期37-41,共5页Semiconductor Technology

基　　金：中国教育部博士基金资助项目(20111103120016);国家电网公司科技项目(5455DW140003)

摘　　要：寿命控制技术是现在广泛使用的方法,该方法旨在减少快恢复二极管(FRD)基区载流子寿命从而实现更小的反向恢复时间,同时不可避免地引起其他性能的变化。通过高能电子辐照和扩铂对1 200 V FRD进行了寿命控制,并对铂扩散和电子辐照样品在正向压降温度特性、静态和反向恢复特性等方面进行了对比分析,发现铂扩散样品随扩铂温度的增加,其击穿电压变大;高能电子辐照器件呈现电压正温度系数,其正向压降和反向恢复时间(VF-trr)折中曲线更靠近原点。实验结果表明,高能电子辐照样品具有更好的温度系数、更好的VF-trr折中特性,然而反向电流在125℃却高达约210μA。Lifetime control technology is a widely used method which is aimed at reducing carrier lifetime of the fast recovery diodes（ FRDs） in the base region so as to realize smaller the reverse recovery time. At the same time,it inevitably causes the changes of other properties. The 1 200 V FRDs were influenced by two different lifetime controlled treatments,such as platinum treatment and electron irradiation treatment. And positive temperature characteristics,static and reverse recovery characteristics of the platinum diffusion and electron irradiation samples were compared and analyzed. It was found that the breakdown voltage of platinum diffused samples increasesd with the increasing platinum temperature.And the high energy electron irradiated FRDs presented a positive temperature coefficient and with the forward voltage drop and reverse recovery time（ VF-trr） trade-off curve closer to the origin. The experimental results show that high energy electron irradiation samples have better temperature coefficient and better VF-trrtrade-off curve. The reverse leakage current is about 210 μA at the temperature of 125 ℃.

关 键 词：寿命控制 扩铂 电子辐照 快恢复二极管(FRD) 深能级瞬态谱(DLTS) 

分 类 号：TN31[电子电信—物理电子学]