集成电路工艺实验教学的探索与实践  

Exploration and Practice of Integrated Circuit Process Experiment Teaching

作　　者：李建军[1] 王姝娅[1] 杜涛[1] 王刚[1] 张国俊[1] 李威[1] 李平[1] 

机构地区：[1]电子科技大学微电子与固体电子学院,四川成都610054

出　　处：《实验室研究与探索》2015年第11期162-165,共4页Research and Exploration In Laboratory

基　　金：四川省高等教育人才培养质量和教学改革项目(川教函[2014]450号);教育部高等学校本科教学改革与教学质量工程项目(教高函[2012]2号);电子科技大学本科教育教学改革研究项目(2013XJYYL019)

摘　　要：在我国集成电路产业又一次高速发展之际,以卓越工程师培养计划为导向,探索并实践了集成电路工艺实验教学。从系统工程的角度,将理论联系实际作为贯穿整个教学的思路与方法。充分发挥了以学生为主的教学形式,完成从设计到实验制作再到测试验证整个过程。将理论与实践结合,创新与实践结合起来,培养了学生分析问题、解决问题的能力。On the occasion of the rapid development of IC industry in China,under the guideline of Outstanding Engineers Training Plan,exploration and practice for integrated circuit process experiment teaching were carried out.From the perspective of engineering system,the theory connected with practice is the throughout idea and method of teaching. From the process of designing- manufacturing- testing- verifying,the experiments were all finished by the students themselves. The experience suggests that combining theory with practice,and innovation with practice,the ability of the students in analyzing and solving problems can be improved.

关 键 词：集成电路工艺 实验教学 卓越工程师计划 教学方法 

分 类 号：TN405[电子电信—微电子学与固体电子学] G642.423[文化科学—高等教育学]