磁控共溅射沉积Al-Al_2O_3复合膜的结构与性能  

Structure and properties of magnetron co-sputtering Al-Al_2O_3 composite film

作　　者：王凯亮[1,2] 孙勇[1,2] 郭中正[1,2] 段永华[1,2] 孙国琪[1,2] 

机构地区：[1]昆明理工大学材料科学与工程学院,云南昆明650093 [2]昆明理工大学云南省新材料制备与加工重点实验室,云南昆明650093

出　　处：《金属热处理》2016年第1期184-189,共6页Heat Treatment of Metals

基　　金：国家自然科学基金(51201079)

摘　　要：用直流(DC)和射频(RF)磁控共溅射法在硅衬底上制备Al-Al_2O_3复合膜,用射频磁控溅射Al_2O_3膜作对比。通过XPS、XRD、HRTEM、FESEM和SPM研究了Al-Al_2O_3复合膜和纯Al_2O_3膜的微观结构和表面形貌,用纳米压痕仪和材料表面性能测试仪测试了样品的显微硬度和抗摩擦磨损性能。结果表明,当射频功率PRF恒定时,Al-Al_2O_3复合膜中Al相的含量和晶粒尺寸与直流功率PDC呈正比关系,Al的加入使Al-Al_2O_3复合膜中非晶态的Al_2O_3颗粒细化,相比纯Al_2O_3膜,表面粗糙度明显降低,并对复合膜力学性能产生影响。Al-Al_2O_3复合膜的硬度高于纯Al_2O_3膜,并具有更加优异的抗摩擦磨损性。直流功率PDC=50 W时,Al-Al_2O_3复合膜综合性能最佳,硬度达到14.4 GPa,摩擦因数低至0.15。By the method of the combination of DC and RF magnetron sputtering,the Al-Al2O3 composite films were prepared on silicon substrates. The Al2O3 film was prepared by RF magnetron sputtering for comparison. The microstructure and surface morphologies of the AlAl2O3 composite film and pure Al2O3 film were investigated by XPS,XRD,HRTEM,FESEM and SPM. The microhardness and frictional wear resistance of the samples were also tested by nano-indentor and material surface properties tester. The results show that the content and grain size of aluminum phase in Al-Al2O3 composite film are correlated positively with DC power PDCunder the condition of the constant RF power. The addition of Al refines amorphous Al2O3 particles of the Al-Al2O3 composite film. Compared to the pure Al2O3 film,the surface roughness of the Al-Al2O3 composite film decreases obviously,which have effects on the mechanical properties of the composite film. The hardness of the Al-Al2O3 composite film is higher than that of the pure Al2O3 film. The Al-Al2O3 composite film present superior abilities in anti-frictional wear. The hardness and average friction coefficient of the Al-Al2O3 composite film with PDC= 50 W are 14. 4 GPa and 0. 15,respectively.

关 键 词：磁控共溅射 Al-Al2O3复合膜 微观结构 表面形貌 显微硬度 抗摩擦磨损性能 

分 类 号：TB333[一般工业技术—材料科学与工程]