纳米薄膜气敏技术发展与展望  

Development and prospect of nanometer film gas sensor technology

作　　者：孙冰[1] 田丰[2] 汪鹏[2] 高金雍[2] 

机构地区：[1]天津计量监督检测科学研究院,天津300192 [2]河北工业大学,天津300401

出　　处：《传感器世界》2016年第2期19-23,共5页Sensor World

摘　　要：目前,纳米薄膜气体传感器的发展趋势是提高灵敏度和工作性能,降低功耗和成本,缩小尺寸,简化电路。介绍Sn O_2、Zn O、Ti O_2等主要纳米薄膜气敏传感器研究现状。电子鼻依靠气体传感器阵列而组成,还介绍了装有电子鼻的机器人。The current development trends of gas sensor is to improve the sensitivity and working performance, reduce the power consumption, cost and size, and simplify the circuits. The research status of Sn O_2, Zn O, Ti O_2 and other major nanometer thin fi lm gas sensors are introduced. The electronic nose is formed by a gas sensor array. The robot with electronic nose is presented, too.

关 键 词：气敏技术 发展现状和前景 金属氧化物 纳米气敏薄膜 电子鼻 机器人 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]