一种MEMS加速度计的温度误差补偿方法  

A method of temperature error compensation for MEMS accelerometer

作　　者：郝嵘[1] 高国伟[1] 潘宏生[1] 何刚[1] 马超[1] 

机构地区：[1]北京信息科技大学自动化学院,北京100192

出　　处：《北京信息科技大学学报（自然科学版）》2016年第1期38-42,共5页Journal of Beijing Information Science and Technology University

基　　金：国家自然科学基金资助项目(61271047);北京市属高校创新能力提升计划项目(TJSHG201310772026)

摘　　要：为降低温度对微电子机械系统(micro-electro-mechanical system,MEMS)加速度计的影响,设计了一种MEMS加速度计用于倾角测量方面的温度补偿方法。根据加速度计静态模型以及加速度计测量倾角的原理建立了固定温度下的温度补偿模型,模型中引入了角度以及其它未知参数,利用最小二乘法并结合实验获得的加速度计输出的AD值和给定角度值,求得了固定温度下温度补偿模型中的未知参数,利用该模型计算出了固定温度下补偿后的角度值。经验证,补偿后倾角测量精度提高了2个数量级。该补偿方法精度较高,操作方便,适于批量校准,已成功应用于某起重机底盘水平状态监控系统中。In order to reduce the impact of temperature on MEMS accelerometers, an MEMS accelerometer temperature compensation method in tilt angle measurement is designed. According to the accelerometer static model and accelerometer principle of tilt angle measurement, the temperature compensation model of fixed temperature is established. Tilt angle and other unknown parameters are introduced in the model. Using the method of least squares and combining with the AD value of the accelerometer output in experiment, the temperature compensation model of the fixed temperature is obtained. Then the compensated angle valueof fixed temperature is calculated through the model. The experiments verify that this compensation method make tilt angle precision increase two orders of magnitude. The compensation method has high precision. It is easy to operate and suitable for batch calibration. It has been successfully applied to level condition monitoring system of a crane chassis.

关 键 词：微电子机械系统 加速度计 最小二乘法 温度补偿 

分 类 号：TP212.6[自动化与计算机技术—检测技术与自动化装置]