一种基于梯度信息的SEM图像重建方法  

Method about Reconstruction of SEM Image Based on Gradient

作　　者：毛项迪 史峥[1] 

机构地区：[1]浙江大学超大规模集成电路设计研究所,杭州310027

出　　处：《计算机科学》2016年第2期297-301,共5页Computer Science

基　　金：国家自然科学基金:面向28-14nm的高空间分辨率工艺偏差在线检测关键技术研究(61204111)资助

摘　　要：针对集成电路制造过程中由扫描式电子显微镜(Scanning Electron Microscope,SEM)产生的灰度图像二值化问题,提出一种利用图像边缘的梯度信息、通过统计重建SEM图像的方法。用Otsu方法分析SEM图像的噪声组成,通过滤波去噪过程,用Kirsch算子分析图像的梯度信息,再利用图像外边缘的梯度大于内边缘的梯度的特性,对每一个区域进行分类统计,根据统计信息进行最后的图像填充。实验结果表明,该算法在高分辨率的图像下显示出了高稳定性和高度自动化;在低分辨率的图像下,该方法有效避免了边缘提取失败带来的影响,能正确、完整地重建图像。Aiming at the problem about binaryzation of gray level image which is produced by scanning electron microscope（SEM）in the process of integrated circuit manufacturing,this paper put forward a method about reconstruction based on the gradient of SEM image and statistics.Otsu is used to analyze the noise of SEM image,and by means of smoothing,the gradient information of image is got with Kirsch operator.Then according to the feature that the gradient of outer edge is larger than inner edge,the algorithm uses statistic information to fill the image.Experimental results show that the algorithm has high stability and automation in high resolution images,and in low resolution images,it avoids the effect of edge extracting failing and produces correct binary image completely.

关 键 词：SEM图像 梯度信息 KIRSCH算子 统计 二值化 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]