体声波传感器的系统级行为仿真  

System-level Behavior Simulation of Bulk Acoustic Wave Sensors

作　　者：黄振华[1,2] 高杨[2,3] 蔡洵 

机构地区：[1]西南科技大学信息工程学院,四川绵阳621010 [2]中国工程物理研究院电子工程研究所,四川绵阳621999 [3]重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆400044 [4]重庆大学光电技术及系统教育部重点实验室,重庆400044

出　　处：《压电与声光》2016年第2期183-185,188,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61574131);中国工程物理研究院超精密加工技术重点实验室基金资助项目(2014ZA001);中国工程物理研究院电子工程研究所创新基金资助项目(S20141203);西南科技大学特殊环境机器人技术四川省重点实验室开放基金资助项目(14zxtk01);西南科技大学研究生创新基金资助项目(15YCX122;15YCX123;15YCX125);重庆大学新型微纳器件与系统技术国防重点学科实验室访问学者基金资助项目(2013MS04)

摘　　要：为证明六端口网络可用于体声波(BAW)传感器读出电路,对包含薄膜体声波谐振器(FBAR)和微带六端口网络的BAW传感器最小系统建立等效电路模型。在ADS软件中对FBAR建立Mason等效电路模型和对微带六端口网络建立等效电路模型。微带六端口网络的端口1连接射频源,端口2与FBAR相连,其他4个端口分别连接4个50Ω的电阻用于读取功率;在Matlab软件中分别使用根心解法和平均解法对FBAR的反射系数进行求解,解得两条反射系数与频率曲线,分析得到了两种反射系数近似计算方法的优劣,并分析了六端口网络工作频带的增宽方法。仿真结果表明,微带六端口网络能准确测量出FBAR的反射系数与频率曲线,证明六端口网络可用于BAW传感器读出电路。To prove the six-port networks can be used for the read-out circuit of BAW sensor,the equivalent circuit model of the BAW sensor consisting of FBAR and microstrip six-port network is established.The Mason equivalent circuit model of FBAR is established,and the equivalent circuit model of the microstrip six-port network is established in ADS software.The port 1of the microstrip six-port network is connected with the radio frequency source,the port 2is connected with the FBAR,the other four ports are respectively connected with four 50 ohm resistors which are used to read the power per port.The FABR reflection coefficients are solved by the radical center method and the average method respectively and two reflection coefficients v.s frequency curves of FBAR are obtained.The advantages and disadvantages of two kinds of approximate calculation method of the reflection coefficient are analyzed,and the method of increasing the operating bandwidth of the six-port network is also analyzed.The results of simulation show that the microstrip six-port network can accurately measure the reflection coefficient v.s frequency curves of the FBAR,hence the six port network can be used for the BAW sensor readout circuit.

关 键 词：体声波 体声波传感器 薄膜体声波谐振器 六端口网络 读出电路 

分 类 号：TN41[电子电信—微电子学与固体电子学] TN405