MEMS陀螺技术国内外发展现状简述  

A brief review on the development of MEMS gyroscopes at home and abroad

作　　者：陈尚[1] 张世军[1] 穆星科[1] 陈永强[1] 

机构地区：[1]中国运载火箭技术研究院研究发展中心,北京100076

出　　处：《传感器世界》2016年第4期19-23,共5页Sensor World

摘　　要：随着MEMS技术的快速发展,惯性器件微陀螺得到了广泛的发展和应用。MEMS陀螺具有体积小、重量轻、成本低和可批量生产等独特优点,在军事领域有着广阔的发展和应用前景,受到了各军事强国的青睐。本文对MEMS陀螺的军事需求进行了初步介绍,重点针对国内外典型MEMS陀螺器件的结构形式、基本原理、优缺点、关键性能指标进行了梳理和分析,并对它们的应用前景进行了展望。随着微机电技术的发展和新型材料的应用,MEMS陀螺的种类将进一步多样化,MEMS陀螺将在惯性导航和自动控制等方面发挥越来越重要的作用。With the rapid development of MEMS technology, micro gyro inertial devices get extensive development and application. With many unique advantages of small volume, light weight, low cost, mass production and others, MEMS gyros have broad prospects for development and application in many military fields, thus get the favour of military powers. In this paper, the preliminary introduction of the military requirements for MEMS gyros are presented with focus on the structures, basic principles, advantages and disadvantages, key performance indicators of typical MEMS gyroscope devices at home and abroad, and the application prospects of these devices are discussed. With the development of micro-electro-mechanical technology and application of new materials, the types of MEMS gyroscopes will diversified further, MEMS gyroscopes will play more and more important roles in inertial navigation and automatic control.

关 键 词：MEMS 陀螺 惯性器件 综述 

分 类 号：TJ5[兵器科学与技术—军事化学与烟火技术]