几种光产酸剂的合成与产酸性能研究  

Synthesis and Acid-generation Properties of A Few Kinds of Photoacid Generators

作　　者：李金亮 

机构地区：[1]招远市安全生产检测站,山东招远265400

出　　处：《广州化工》2016年第9期38-39,94,共3页GuangZhou Chemical Industry

摘　　要：综述了几种不同类型光产酸剂合成反应及产酸性能研究,包括三嗪类化合物的合成、鎓盐类化合物和苯磺酸酯类化合物的合成及产酸性能研究。通过对比,得出不同类型的光产酸剂在不同溶剂中,不同波长下的光源曝光产酸率不同,可应用于不同的光致抗蚀剂体系。The synthesis and acid-generation properties of a few different kinds of photoacid generators were summarized , included the synthesis and acid-generation properties of triazine derivatives , sulfonium salt and phthalim idotosylate.By contrast , the acid-productivity of different kinds of photoacid generators were different when exposed in different solvents , different wavelengths of light , which can be used as photoacid generator in resist system .

关 键 词：光产酸剂 合成 产酸率 

分 类 号：TN05[电子电信—物理电子学]