铝合金表面磁控溅射Al-Al_2O_3复合涂层的结构及耐腐蚀性能  

Structure and Corrosion Resistance of Magnetron Sputtered Al-Al_2O_3 Composite Coating on Al Alloy Surface

作　　者：王凯亮[1,2] 孙勇[1,2] 郭中正[1,2] 段永华[1,2] 孙国琪[1,2] 

机构地区：[1]昆明理工大学材料科学与工程学院,云南昆明650093 [2]云南省新材料制备与加工重点实验,云南昆明650093

出　　处：《热加工工艺》2016年第10期157-160,共4页Hot Working Technology

基　　金：国家自然科学基金资助项目(51201079)

摘　　要：用Al和Al_2O_3双靶磁控共溅射工艺在抛光铝合金衬底上制备了Al-Al_2O_3复合涂层,同时制备纯Al涂层作对比。利用X射线衍射仪和场发射扫描电镜研究了Al-Al_2O_3复合涂层的微观结构和形貌,通过划痕实验和电化学腐蚀实验对复合涂层的膜基结合力和耐腐蚀性能进行了测试。结果表明,Al-Al_2O_3复合涂层呈较强的Al(111)择优取向,Al_2O_3相以非晶形式存在。直流功率PDC恒定时,射频功率PRF增大,复合涂层中Al相晶粒更加细化,涂层的平整度和致密度明显提高。Al-Al_2O_3复合涂层与铝合金衬底的结合力良好,可达到43 N。相比纯Al涂层,Al-Al_2O_3复合涂层具有优异的耐腐蚀性,其中PRF=150 W的复合涂层的耐腐蚀性能最佳,腐蚀电流密度为0.0016 m A/cm^2,该值相比纯Al涂层降低了一个量级。The Al-Al2O3 composite coating was prepared on polishing aluminum alloy substrates by magnetron co-sputtering with Al and Al2O3 targets. Meanwhile, the pure Al coating was prepared for comparison. The microstructure and morphologies of Al-Al2O3 composite coatings were investigated by XRD and field emission scanning electron microscope （FESEM）. The bonding force and the corrosion resistance of composite coating were also measured by scratch and electro-chemical corrosion tests. The results show that the Al-Al2O3 composite coatings appeare strong Al （111） preferred orentafion, and the Al2O3 phase exists in amorphous form. Under the condition of the constant DC power PDC, the extent of Al grain refinement and the flatness and density of the Al-Al2O3 composite films increase significantly with the increase of RF power PRr. The bonding force between Al-Al2O3 composite coatings and aluminum alloy substrates is excellent （up to 43 N）. Compared with the pure Al coating, the Al-Al2O3 composite coatings present superior corrosion resistance. The corrosion current density of the composite coating with Pav=150 W is 0.0016 mA/cm2. The value is an order of magnitude lower than that of the pure Al coating.

关 键 词：磁控共溅射 Al-Al2O3复合涂层 微观结构 膜基结合力 耐腐蚀性 

分 类 号：TG178[金属学及工艺—金属表面处理]