高精度非回转对称非球面加工方法研究  

Research on manufacturing method of non-rotationally symmetrical aspheric surface with high accuracy

作　　者：徐乐[1] 张春雷[1] 代雷[1] 张健[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室超精密光学工程研究中心,吉林长春130033

出　　处：《中国光学》2016年第3期364-370,共7页Chinese Optics

基　　金：国家科技重大专项资助项目(No.2009ZX02205)~~

摘　　要：本文提出一种高精度非回转对称非球面加工方法。首先,通过范成法铣磨出非回转对称非球面的最佳拟合球;然后,利用古典抛光修正小磨头确定抛光难以修正的中频误差;最后,利用高精度气囊抛光设备(IRP)精确对位精修面形,在不引入额外中频误差条件下,通过高精度对位检测技术实现非回转对称非球面高精度加工。将该方法应用于定点曲率半径为970.737 mm、k=-1、口径为106 mm三次非球面加工,降低了加工难度,提高了加工精度,面形误差收敛到1/30λ(RMS)。实验结果验证了本文加工方法的正确性和可行性,对高精度非回转对称非球面加工具有一定的指导意义。A novel manufacturing method of non-rotationally symmetrical aspheric surface with high accuracy is proposed in this paper.First,a optimum fit sphere of non-rotationally symmetrical asphere is ground through generating cutting,which is then polished through triditional polishing method in order to remove mid-spatial-frequency errors that cannot be realized through sub-aperture polishing tool.Finally,bonnet polishing method （IRP）is used for corrective polishing without generating extra mid-spatial-frequency errors in condition of high-accuracy positioning measurement technology.This method is employed in the manufacuring of a third-or-der aspheric surface with parameters of ROC =970.737 mm,k =-1 and D =106 mm.After several polishing iterations,the figure accuracy can be converged to 1 /30λ（RMS）.The correctness and feasibility of the manu-facturing method are proved.This method would be meaningful in manufacturing non-rotationally symmetrical＆amp;nbsp;aspheric surface with small deviation in the future.

关 键 词：非回转对称 非球面 气囊抛光 IRP 抛光 

分 类 号：TQ171.684[化学工程—玻璃工业]