一种基于MEMS芯片的新型地面大气电场传感器  

A Novel MEMS Chip-based Ground Atmospheric Electric Field Sensor

作　　者：杨鹏飞[1] 陈博[2] 闻小龙 彭春荣[2] 夏善红[2] 郝一龙[1] 

机构地区：[1]北京大学微米/纳米加工技术国家重点实验室,北京100871 [2]中国科学院电子学研究所传感器技术国家重点实验室,北京100190 [3]清华大学微电子学研究所,北京100084

出　　处：《电子与信息学报》2016年第6期1536-1540,共5页Journal of Electronics & Information Technology

基　　金：国家自然科学基金项目(61327810;61201078);国家自然科学基金重大仪器专项(61302032)~~

摘　　要：该文基于MEMS电场敏感芯片,研制出了一种新型的地面大气电场传感器,解决了现有场磨式电场仪易磨损、功耗大、故障率高等问题。敏感芯片采用SOIMUMPS加工工艺制备,其芯片面积仅为5.5 mm×5.5 mm。该文提出了传感器敏感芯片的弱信号检测方法,设计出了满足环境适应性的传感器整体结构方案,并建立了传感器的灵敏度分析模型。对电场传感器进行测试,测量范围为-50 k V/m^50 k V/m,总不确定度为0.67%,分辨力达到10 V/m,功耗仅为0.62 W。外场试验结果表明,MEMS地面大气电场传感器在晴天和雷暴天的电场探测结果,与Campbell公司场磨式电场仪探测结果都有较好的一致性,说明该传感器能满足预测雷暴要求,实现雷电监测和预警功能。In this paper, a novel ground atmospheric electric field sensor based on MEMS electric field sensing chip is presented, which resolves the problems of motor wear, high power consumption and failure rate of the conventional electric field mill. The chip is fabricated in a commercial SOIMUMPS process, and the area of this chip is only 5.5 mm×5.5 mm. A weak signal detection method for the chip is proposed. The sensor overall structure scheme is designed, and the sensitivity model is established. The minimum detectable electric field of the sensor is 10 V/m with an uncertainty of 0.67% in the range of-50 k V/m^50 k V/m, and its power consumption is only 0.62 W. The outdoor test shows that the plotted data of the sensor agrees well with those of USA Campbell field mill on both sunny days and thunderstorm days, which indicates that the developed sensor can meet the requirement of lighting monitoring and early warning.

关 键 词：微机电系统 电场传感器 MEMS地面大气电场传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]