用于太赫兹频段的矩形波导腔加工工艺  

Processing Technology of a Rectangular Waveguide Cavity for Terahertz Frequency Band

作　　者：孙玉洁[1,2] 段俊萍[1,2] 寇海荣 张斌珍[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2016年第7期473-477,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61401405;51475438);山西省基础研究资助项目(2014011021-4)

摘　　要：介绍了一种用于太赫兹频段的矩形波导腔的设计和加工工艺。利用Comsol Multiphysics软件对射频器件中心频率为0.4 THz时,横电波(TE10波)在矩形波导腔中的传播进行了仿真。仿真结果表明,波导口尺寸设计为0.56 mm×0.3 mm时,电磁波在该波导中的传输损耗较小,插入损耗S21接近-1 dB,回波损耗S11小于-30 dB。该结构利用牺牲层技术制备。采用SU-8环氧基负性光刻胶作为介质层,低转速多次旋涂AZ50XT形成牺牲层结构,制备出矩形波导腔结构。该波导腔结构内壁表面平整,侧壁垂直度为87.7°,上层结构和侧壁之间结合紧密,为实现波导腔结构的加工提供了一种新的途径。The design and processing technology of a rectangular waveguide cavity were introduced for terahertz frequency band.When the center frequency of the RF device was 0.4 THz,the propagation performance of the TE10 wave in the rectangular waveguide cavity was simulated by Comsol Multiphysics software.The simulation results show that when the rectangular waveguide port is designed as 0.56 mm×0.3 mm,the transmission loss of the electromagnetic wave in the waveguide is smaller,the insertion loss S21approaches-1 dB and the return loss S11 is less than-30 dB.The rectangular waveguide cavity was fabricated by sacrificial layer technology.The SU-8 epoxy negative photoresist was used as a dielectric layer,and the AZ50 XT was coated multi-times at a low speed to form a sacrificial layer,thus the rectangular waveguide cavity was fabricated.The inner wall of the waveguide cavity is smooth and the verticality of the sidewalls is 87.7°,the upper structures and the sidewalls bond closely,providing a new way for the fabrication of the waveguide cavity.

关 键 词：太赫兹(THz) 牺牲层 矩形波导腔 AZ50XT SU-8 

分 类 号：TH703[机械工程—仪器科学与技术]