热隔离式MEMS气体质量流量传感器设计  

Design of thermal isolated MEMS gas mass flow sensor

作　　者：谷永先[1] 曾鸿江[1] 邬林[1] 胡娜娜[1] 钱江蓉[1] 

机构地区：[1]中国电子科技集团公司第三十八研究所微电子封装研究中心,安徽合肥230000

出　　处：《传感器与微系统》2016年第6期72-74,共3页Transducer and Microsystem Technologies

摘　　要：研制了一种热隔离式微机电系统（MEMS）气体质量流量传感器。加热电阻器和上下游测温电阻器采用热隔离悬梁式结构,间隔240μm。对恒温差电路的设计要点进行了分析并制作了系统电路。测试拟合了传感器输出电压随气体流量的关系曲线,并对传感器进行了标定。测试结果表明：在0～20 L/min的流量范围内,传感器响应速度快,灵敏度高,输出信号平滑,适合于工业及医疗等领域。A thermal isolated micro-electro-mechanical system （MEMS） gas mass flow sensor is developed. The thermal isolated cantilever structure is adopted for heating resistor, upstream and downstream resistors with 240 p.m interval. The design key point of constant temperature difference circuit is analyzed, and system circuit is made. The curve of relationship between sensor output vohage and gas flow is measured, and accordingly sensor is calibrated. Test result shows that at flow range of 0 - 20 L/min, the sensor has fast response speed, high sensibility, smooth output signal, so the sensor is suitable for industrial and medical fields.

关 键 词：微机电系统 热隔离 气体质量流量传感器 恒温差 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]