流量传感器中敏感薄膜电阻制备及其特性分析  

Preparation and Characteristic Analysis of Sensitive Thin Film Resistor in Flow Sensor

作　　者：齐虹[1] 李玉玲[1] 王晓光[1] 张岩[1] 寇文兵[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001

出　　处：《仪表技术与传感器》2016年第5期12-14,共3页Instrument Technique and Sensor

摘　　要：通过对热膜式流量传感器中敏感薄膜电阻制备技术的研究,分别介绍了流量传感器中敏感薄膜电阻设计的基本原理、敏感薄膜生长方法及一些具体应用实例。分析了影响薄膜黏附性和内应力的工艺因素,提高了敏感薄膜电阻的温度系数,制作出了具有良好稳定性和一致性的敏感薄膜电阻,满足流量传感器的使用要求。使流量传感器重复性可达±1%,该制备方法适用于热膜式流量传感器的小批量生产。Basic design principles of sensitive thin film resistor in flow sensor,growth method of sensitive film,and some specific applications were introduced respectively,by studying the sensitive thin film resistor in manufacturing process for thermal film based flow sensor. Influenced process factors of the film adhesive and internal stress were analyzed,thus increasing the temperature coefficient of sensitive thin film resistor,and sensitive thin film resistor with good stability and conformance in order to meet the use requirements of the flow sensor was improved. With this sensitive thin film resistor,the repeatability of flow sensor can reach ±1%,The process method is suitable for small batch production of thermal film based flow sensor.

关 键 词：流量传感器 敏感薄膜电阻 温度系数 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]