氧化铝陶瓷金属化层温度分析研究  

Modeling and Simulation of Temperature Field in Al_2O_3 Ceramic Metallization

作　　者：钟伟[1] 邹桂娟[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,绵阳621900

出　　处：《真空科学与技术学报》2016年第6期718-722,共5页Chinese Journal of Vacuum Science and Technology

基　　金：中国工程物理研究院科学技术发展基金(2014A0302012)

摘　　要：工艺温度是影响陶瓷金属化质量的关键因素之一,针对高温氢炉中陶瓷金属化层温度难以实时测量的问题,本文建立氧化铝陶瓷金属化过程的三维流动传热数学模型。模型采用随温度变化的动态材料物性参数,考虑辐射、对流、传导三种传热形式,利用有限体积法求解陶瓷金属化过程中炉内的流动与传热问题,获得陶瓷金属化温度实时变化曲线。瞬态计算结果表明不同位置处最高烧结温度相差26℃,且比金属化工艺设定温度曲线低20~40℃,这为优化氢炉结构、进一步提高炉温均匀性提供参考依据。The 3-D fluid-flow and temperature fields,in the furnace for Mo-covered Al2O3 ceramic metallization, were mathematically described with fluidflow heat transfer model theoretically analyzed in fluiddynamics,numerically simulated in finite volume method （FVM）, and experimentally measured. The impact of the realistic situation, inclu- ding the workpieee＇ s geometry and position, H2 flow-rate, temperature-dependent properties of the materials involved, radiation and convection and transfer of heat, on the time-evolution of the fluid-flow and temperature fields was inves- tigated. The simulated results show that the time-evolution of the temperature distribution significantly depends on the H2 flow-rate,heating time and position. For example,the highest transient spatial sintering temperature-difference was 26℃ ,and the realistic temperature variation of the three metallization layers were 20 - 40℃ lower than that of the loaded metallizationprofile. The simulated and measured results were in good agreement with a discrepancy below 0. 67%. We suggest that the simulated results be of some technological interest in Al2O3 ceramic metallization.

关 键 词：氧化铝陶瓷 金属化 工艺条件 数值模拟 

分 类 号：TG4[金属学及工艺—焊接]