基于负电晕放电原理的MEMS SF_6气体传感器研究  

Research on MEMS SF_6 Gas Sensor Based on the Principle of Negative Corona Discharge

作　　者：陈硕 张金英[2] 李璐 郑天祥 

机构地区：[1]国网智能电网研究院,北京市昌平区102209 [2]中国科学院电子学研究所传感技术国家重点实验室,北京市海淀区100190

出　　处：《智能电网》2016年第6期618-622,共5页Smart Grid

摘　　要：作为高压、特高压领域几乎唯一的绝缘和灭弧介质,SF6的泄漏对电力设备的安全运行和电力系统的稳定可靠造成威胁,而且还会造成人员伤害和大气污染的恶性后果。因此,电力设备对电气设备中SF6气体泄漏的监测必不可少。主要阐述基于负电晕放电原理的SF6传感器的基本原理、器件结构及性能;分析基于MEMS技术的微型SF6传感器的发展现状;设计制备MEMS SF6基本原理传感器的硅基微电极阵列,其中硅尖阵列间距为55μm,高度约为16μm,顶端曲率半径约为150 nm。基于以上微电极阵列组装负电晕放电器件并测试其伏安特性,验证其电晕放电趋势,可用于SF6气体检测。As a unique insulating and arc-extinguishing medium in high-voltage（HV）, ultra-high voltage（UHV） field, SF6 leakage not only poses threats to safe operation of electrical equipment and stability of power system, but also causes personal injury and air pollution. Therefore, it is essential to monitor the leak of SF6. The principle, device structure and the performance of SF6 gas sensor based on the principle of negative corona discharge are described. The development status of SF6 micro sensor based on micro-electro-mechanical systems（MEMS） technology has been analyzed. MEMS silicon-based micro-electrode array of the MEMS SF6 sensor based on the principle of negative corona discharge is designed and fabricated. The space between the silicon tip array is 55 μm, the height is about 16 μm, and the curvature radius at the top is about 150 nm. The device based on the negative corona discharge is assembled and the voltage-current characteristic is investigated. And the corona discharge trend of the device is verified, which can be applied to SF6 gas detection.

关 键 词：负电晕放电 SF6传感器 微机电系统 微电极阵列 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]