基于SOI的16通道200GHz阵列波导光栅  

A 16-channel Arrayed Waveguide Grating Based on SOI Platform

作　　者：袁配 吴远大[2] 王玥[2] 安俊明[2] 胡雄伟[2] 

机构地区：[1]河南仕佳光子科技有限公司,河南鹤壁458030 [2]中国科学院半导体研究所集成光电子学国家重点实验室,北京100083

出　　处：《半导体光电》2016年第3期313-317,326,共6页Semiconductor Optoelectronics

基　　金：国家"863"计划项目(2013AA031402)

摘　　要：设计并制作了基于绝缘体上硅（SOI）材料的1×16阵列波导光栅（AWG）。该AWG器件的中心波长为1 550nm,信道间隔为200GHz,采用了脊型波导结构。首先确定了波导的结构尺寸以保证单模传输,并利用束传播法（BPM）模拟了波导间隔、弯曲半径和锥形波导长度等参数对器件性能的影响,对器件结构进行了优化,同时也利用BPM方法模拟了器件的传输谱。模拟结果显示：器件的最小信道损耗为4.64dB,串扰小于-30dB。根据优化的器件结构,通过光刻等半导体工艺制作了AWG,经测试得到AWG器件的损耗为4.52～8.1dB,串扰为17～20dB,能够实现良好的波分复用/解复用功能。A 16-channel SOI-based arrayed waveguide grating（AWG）was designed and fabricated.The central wavelength of the AWG is 1 550 nm and its channel spacing 200 GHz.A rib waveguide was used and the optimal structure was chosen to assure the single-mode behaviour.Beam propagation method（BPM）simulations were performed to get the impact of the parameters（waveguide distance,the bending radius,and the taper length）on the performance of the AWG,and the transmission spectrum of the AWG was also obtained by BPM.The simulation results show that the minimum loss of the 16 channels is 4.64 dB,and the crosstalk of the AWG is less than-30 dB.Adopting the optimized parameters,the AWG was fabricated by photo etching lithographic process.The measured result is that the loss of the AWG is 4.52～8.1dB,and the crosstalk is 17 ～ 20 dB,exhibiting excellent performance of wavelength demultiplexing.

关 键 词：阵列波导光栅 波分复用 绝缘体上硅 单片集成 

分 类 号：TN256[电子电信—物理电子学]