面向电容式传感器线性度标定的柔性微动机构设计  

Design of compliant micro-motion mechanism for linearity calibration of capacitive displacement sensors

作　　者：张德福[1] 李显凌[1] 葛川[1] 倪明阳[1] 郭抗[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室超精密光学工程研究中心,长春130033

出　　处：《仪器仪表学报》2016年第6期1210-1217,共8页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(61504142);国家科技重大专项基金(2009ZX02205)项目资助

摘　　要：针对光学精密工程中位移检测问题,研制了一种电容式位移传感器线性度标定装置。阐明了标定装置的组成和标定方法的原理,该装置采用运动轴、测量轴和传感轴三轴共线的设计方案,从测量原理上降低了阿贝误差。基于伪刚体模型和拉格朗日方程建立了机构位移、刚度、强度和固有频率的理论模型,为机构优化设计提供理论依据。计算和仿真结果表明理论模型和有限元分析误差分别为3.764%、3.908%、14.842%和2.666%。试验结果表明行程测试值与理论值、有限元计算值的误差分别为9.254%和13.524%,刚度测试值与理论值、有限元计算值的误差分别为8.472%和11.914%。标定后传感器测试线性度由0.057 48%提高至0.004 39%,测试精度改善明显,能够满足光学精密位移测试需求。表明所搭建的标定装置有效,且建立的机构理论模型和分析方法可信。To meet the requirements of high-precision displacement detection in optical system, a linearity calibration device for linearity calibration of capacitive displacement sensor is proposed. The composition of calibration device as well as the principle of calibration algorithm are involved. The Abbe error is reduced according to the measurement principle, in which the movement axis, the measurement axis and the sensing axis are collinear. The theoretical models of displacement, stiffness, strength and natural frequency are obtained based on thepseudo-rigid model and Lagrange equation, to provide a theoretical basis for mechanism optimized design. The results show that errors between theoretical models and finite element analysis are 3. 764% , 3. 908% , 14. 842% and 2. 666% , respectively. Displacement errors between experiments and theoretical values, FEM values are 9. 254% and 13. 524%. Stiffness error sbetween experiments and theoretical values,FEM values are 8. 472% and 11. 914% , respectively. The linearity of the sensor is increased from 0.057 48% to 0. 004 39% with calibration, and the detection precision is improved significantly. It can satisfy the requirements of optical precision displacement detection and indicate that the theoretical models of the device and the design approach are effective and reliable.

关 键 词：柔性机构 伪刚体模型 传感器 线性度 标定 

分 类 号：TH74[机械工程—光学工程]