金属化后陶瓷表面“红点”问题的研究  

Investigation of “Red Spot” on the Surface of Metallized Alumina Ceramic

作　　者：吕平[1] 彭家根[1] 邹桂娟[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621999

出　　处：《真空》2016年第3期22-25,共4页Vacuum

基　　金：中国工程物理研究院电子工程研究所创新基金项目(S 20151115)

摘　　要：利用SEM/EDS(扫描电镜/电子能谱)、XPS(X射线光电子能谱)结合机械截面样品制备方法,对Al_2O_3陶瓷金属化后表面出现的"红点"进行研究。利用SEM对陶瓷"红点"区域的形貌进行分析,利用XPS、EDS对表面元素成分及价态进行分析,利用SEM/EDS、结合机械截面样品制备方法对杂质元素的深度分布进行分析。结果表明红点区域有明显结构缺陷,致色元素主要为Cr^(3+)。此外,还探讨了氧化铝陶瓷表面红点的显色机理。最后,通过模拟实验研究了一些工艺环节对杂质引入的影响。The red spot appeared on the surface of alumina ceramic after metallization was investigated by SEM/EDS、XPS and mechanical polishing. SEM was applied to observe the morphology of alumina ceramic. XPS and EDS were used to analyze the surficial impurities as well as their chemical states. The distribution of impurities on depth was researched by mechanical polishing and SEM/EDS. The results indicated that there are physical structure defects in red area, and the major cause is Cr^（3＋）.Moreover, the coloring mechanism of red spot on alumina ceramic after metallization was discussed. In the end, experiments were designed and executed to analyze where the impurities were induced.

关 键 词：Mo-Mn法 氧化铝陶瓷 金属化 红点 

分 类 号：TN13[电子电信—物理电子学] TB43[一般工业技术]