基于薄膜热电偶的超精密车削瞬态切削温度的测量  

Measurement of Transient Cutting Temperature in Ultra-Precision Turning Based on Thin-Film Thermocouple

作　　者：董继超[1] 宫虎[1] 曾其勇[2] 王羿[1] 段巍[1] 房丰洲[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]中国计量学院质量与安全工程学院,杭州310018

出　　处：《纳米技术与精密工程》2016年第4期310-314,共5页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51275344);应用光学国家重点实验室开放基金资助项目(2014E3-0018);中国工程物理研究院机械制造工艺研究所所长基金资助项目(K907)

摘　　要：为了实现超精密车削温度的在线测量,本文研究了一种基于薄膜热电偶的测量瞬态切削温度的方法.以切削刀具的刀尖作为镀制薄膜的基底,通过磁控溅射方法制备了Si O2绝缘薄膜和Ni Cr/Ni Si薄膜电极,制成了带有测温传感器并且可以进行超精密车削加工的PCBN刀具.文中对该薄膜热电偶温度传感器进行了标定,得到其塞贝克系数并采用该刀具对PMMA材料进行了超精密车削加工实验,实验结果表明该方法能够有效地测量出加工过程中的瞬态切削温度.In order to achieve the on-line measurement of ultra-precision turning temperature, this paper explored a method of measuring transient cutting temperature based on the thin-film thermocouple. SiO2 insulating film and NiCr/NiSi thin-film-electrodes were prepared on the tip of the cutting tool using mag- netron sputtering method, to fabricate a PCBN tool with thin-film thermocouple sensor, which can measure the temperature during ultra-precision turning. The sensor was calibrated to obtain the Seebeck coefficient and the exploration experiment was conducted by cutting PMMA workpiece on the ultra-precision turning machine. The experimental results show that this method can effectively measure the transient cutting temperature in the machining process.

关 键 词：切削温度 磁控溅射 薄膜热电偶 超精密车削 

分 类 号：TG51[金属学及工艺—金属切削加工及机床]