子孔径拼接在超精密平面加工中的应用  

Application of Subaperture Stitching in Ultra-precision Plane Processing

作　　者：成贤锴[1] 顾国刚[1] 于涌[1] 

机构地区：[1]中国科学院苏州生物医学工程技术研究所,江苏苏州215163

出　　处：《实验室研究与探索》2016年第6期34-36,共3页Research and Exploration In Laboratory

摘　　要：在超精密平面加工过程中,面型精度的检测水平往往限制着精度的进一步提高,常规机械加工的测量仪器一般通过打点方式测量精度,能检精度达到μm级,对于面型精度要求更高的工件往往不能满足要求。引入平面干涉仪的光学检测手段,提高能检精度。对于大尺寸工件,采用子孔径拼接技术还原整个面型,节约成本。检测结果指导加工,从而进一步提高工件面型精度。实验结果证明子孔径拼接后面型和实际面型一致,适用于此类加工的检测。In the ultra-precision plane processing,the further improvement of surface accuracy is usually restricted by detection methods. Conventional measuring methods of machining can detect workpiece of micron-level accuracy,these methods are not suitable for the workpiece of higher surface accuracy. However,with the help of plane interferometer,workpiece of higher surface accuracy can be detected. Subaperture stitching is used to reconstruct the entire surface shape of workpieces of large size,by which higher surface accuracy can be achieved. Experimental results show that surface shape acquired by subaperture stitching is consistent with the actual surface shape. Therefore,subaperture stitching is suitable for the detection of such processing.

关 键 词：光学检测 超精密加工 子孔径拼接 陶瓷导轨 

分 类 号：TH162[机械工程—机械制造及自动化]