逆向热蒸发制备望远镜主镜银反射膜（英文）  

Protected-Silver Coating for Telescope Primary Mirrors Prepared by Downward Thermal Evaporation

作　　者：徐旭[1,2] 刘洪祥[1] 李斌成[1,3] 裴文俊[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院大学,北京100039 [3]电子科技大学光电信息学院,成都610054

出　　处：《光子学报》2016年第6期117-122,共6页Acta Photonica Sinica

基　　金：The National High Technology Research and the Development Program of China

摘　　要：以自上向下热蒸发大型镀膜机为实验平台,开展了逆向蒸发制备大口径银反射镜研究.通过设计特殊蒸发舟及优化相关工艺参数,实现了金属银膜稳定、高速向下蒸发.根据逆向热蒸发工艺特点,选取熔点低、升华型材料Cr和SiO及特殊设计的蒸发舟,以Cr或CrNx为粘结层,SiOx或SiOxNy为保护层,制备了三种具有四层结构的介质保护性银反射膜,并对所制备反射镜样品的反射率、断面形貌和环境稳定性进行了表征.实验结果表明：膜系结构为3nmCr/120nmAg/0.6nmCrNx/150nmSiOxNy的银反射膜具有较好的环境稳定性和光谱特性;通过了24小时湿热实验（50℃/相对湿度98%）和盐雾实验,在400～1 800nm波段光谱范围内,银反射膜的平均反射率达到97.8%.By using a high-vacuum resistive heating evaporation coating machine with the materials evaporated downwards,the research of downward thermal evaporation for large-aperture optics was implemented.The silver coating was prepared at a high deposition rate by resistive heating tungsten filaments without splashing.The adhesion layer and protective layer were also thermally evaporated downwards with specially designed evaporation boats with Cr or CrNxas the adhesion layer and SiOx or SiOxNy as the protective layer.To evaluate the performance of the protected-silver coating,three kinds of protected-silver coatings were prepared and researched in details. The reflectance,cross-section morphology and environmental stability of the prepared coating samples were characterized.The results show that the coating with 3nmCr/120nmAg/0.6nmCrNx/150 nmSiOxNystructure has good performances on environmental stability and spectral characteristics.Especially,it has an average reflectance of 97.8% in the 400～1800nm spectral range,and passed the tests of 24-hour humidity（50℃/98% RH）and salt folg.

关 键 词：薄膜 保护性银反射膜 向下热蒸发 SiOxNy保护层 环境稳定性 

分 类 号：O484[理学—固体物理]