有滞留时间约束的单臂集束型装备调度研究  

Research on Scheduling Problem of Single-arm Cluster Tools with Residency Time Constraints

作　　者：卢睿 李林瑛[2] 

机构地区：[1]辽宁警察学院公安信息系,大连116036 [2]大连外国语大学软件学院,大连116044

出　　处：《系统仿真学报》2016年第8期1776-1782,共7页Journal of System Simulation

基　　金：辽宁省教育厅科学研究(L2014456)

摘　　要：考虑有滞留时间约束的单臂集束型装备调度模型和可调度性问题,建立了包括单臂机械手和加工模块时序约束关系的混合整数规划模型,并从理论上证明了并行模块等价加工时间的合理性。在此模型基础上,分析了单臂机械手和加工模块的周期性加工和搬运晶圆过程,证明了集束型装备可调度性的条件。对模型和可调度性条件进行了仿真实验分析,结果表明模型有效且可行。Considering the scheduling model and schedulibility for single-arm cluster tools with wafer residency time constraints, a mixed- integer linear programming model with both single-arm and temporal constraints for processing module was constructed. The rationality of equivalent processing time for concurrency module was theoretically proved. Based on this, the periodic wafer processing and transportation procedure for both single-arm and processing module was analyzed. Meanwhile, the schedulibility conditions for cluster tools were proved. The simulation experiments were carried out to test the model and schedulable conditions, and the results reveal the validity and feasibility of the presented model.

关 键 词：半导体制造 集束型装备 单臂机械手 可调度性分析 

分 类 号：TP241.2[自动化与计算机技术—检测技术与自动化装置] TP278[自动化与计算机技术—控制科学与工程]