电铸参数对铜基平面微弹簧疲劳性能的影响  

Effects of Electroforming Parameters on Fatigue Properties of Cu-based Planar Micro-spring

作　　者：Cao Quoc Dinh 徐宁[1] 李成园[1] 张新平[1] 

机构地区：[1]南京理工大学材料科学与工程学院,江苏南京210094

出　　处：《兵工学报》2016年第7期1252-1257,共6页Acta Armamentarii

基　　金：江苏省自然科学基金项目(BK20151489);中央高校基本科研业务费专项资金项目(30920140112008);上海航天科技创新基金项目(SAST2015044)

摘　　要：平面微弹簧性能直接影响着微机电系统(MEMS)的效果和可靠性,研制长寿命的平面微弹簧对于保证微机电系统可靠性具有重要的意义。研究了占空比、电流密度、电源属性对电铸平面微弹簧质量的影响,并基于正交实验设计方法优化了工艺;制备了尺寸精度合适和疲劳性能良好的平面微弹簧,满足了MEMS的需要。研究表明:大的占空比会降低微弹簧的疲劳性能;双脉冲电源电铸的平面微弹簧疲劳性能优于直流电源和单脉冲电源电铸的;最优工艺为采用双脉冲电源、电流密度3 A/dm2、正向占空比10%;反向占空比10%.平面微弹簧疲劳寿命在定位移0.2 mm的情况下,最大517次。Micro-spring is an important actuating component used widely in microelectromechanical systems. It is important to develop micro-forming techniques for manufacture of micro-springs with high-fa- tigue life. The effects of duty cycle, current density, and power properties on the quality of micro-electro- forming planar micro-springs are studied. The process is optimized using an orthogonal experiment in or- der to achieve the high dimensional accuracy and fatigue properties of the planar micro-springs and meet the demand of microelectromechanical systems. The result shows that the fatigue property of micro-spring decreases as the duty cycle increases. Fatigue property of planar micro-spring prepared by double pulse power is superior to the one that prepared by direct current power and single pulse power. The optimal process is to use double pulse power, 3 A/dm2 current density, 10% positive duty cycle, and 10% negative duty cycle. The fatigue life of planar micro-spring can reach 517 times under the constant displacement of 0.2 mm.

关 键 词：兵器科学与技术 平面微弹簧 微电铸 疲劳性能 正交实验 

分 类 号：TQ153.4[化学工程—电化学工业]