光刻投影物镜恒温水套小比例模型的设计与性能测试  

Design and Performance Testing of Constant-Temperature Water Jacket Small-Scale Model of Lithographic Projection Lens

作　　者：彭海峰[1] 于新峰[1] 秦硕[2] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室超精密光学工程中心,吉林长春130033 [2]空军航空大学航空理论系,吉林长春130022

出　　处：《激光与光电子学进展》2016年第8期140-145,共6页Laser & Optoelectronics Progress

基　　金：国家重大专项基金(2009ZX02205)

摘　　要：恒温水套是光刻物镜工作环境温度控制系统的重要组成部分。为了研究恒温水套的关键参数与性能，设计了一个小比例水套模型。恒温温控系统对其提供±0．001℃的去离子水，通过对比三镜光机系统温度变化及热像差变化获取小比例水套的关键参数。实验数据表明，在加入热扰动且环境温度为22．06～22．16℃的情况下，三镜光机系统的内壁温度被控制在（22±0．01）℃以内，波像差在热扰动后迅速恢复至10．12nm，与装调完毕状态基本一致。由此可见，此种水套结构可以满足光刻投影物镜的温度控制要求，可在此基础上设计等比例恒温水套模型。Constant-temperature water iacket is an important part of the lithographic lens working environment controlling system. A small-scale water jacket model is designed to research the key parameters and properties of constant-temperature water jacket. The constant-temperature water controlling system provides deionized water within 4-0. 001℃ to it, and the key parameters of small-scale water jacket is obtained by comparing the variation of three-mirror optical-mechanical system temperature and thermal aberration. The experimental data shows that when the thermal disturbance is introduced and the temperature of the environment is 22.06-22.16℃, the temperature of the inside barrel of the three-mirror optical-mechanical system dan be controlled within （22±0.01）℃. The wave aberration is restored to 10.12 nm after thermal aberration, which is almost equal to the status of the assembled and adjusted system. It shows that the structure of the water iacket can satisfy the demand of the temperature controlling for the projection lens. The equal proportion constant-temperature water jacket can be designed based on it.

关 键 词：测量 投影物镜 恒温水套 热像差 温度测试 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]