非晶硅薄膜和结晶硅薄膜的拉曼光谱  

The Raman Spectra Study of Amorphous Silicon Thin Films and Crystalline Silicon Thin Films

作　　者：马希文 杨玉庆 张坤 何佳 张霞 

机构地区：[1]上海工科技术大学材料工程学院,上海201620

出　　处：《实验室研究与探索》2016年第8期33-36,共4页Research and Exploration In Laboratory

基　　金：国家自然科学青年基金资助项目(61404082);上海市市级大学生创新训练资助项目(cs1505010)

摘　　要：以玻璃为衬底,利用等离子体增强化学气相沉积工艺制备了非晶硅(α-Si)薄膜,然后通过准分子激光晶化方式获得结晶硅(nc-Si)薄膜,采用激光显微拉曼光谱仪对非晶硅薄膜、结晶硅薄膜这两类薄膜的拉曼光谱效应和结晶质量等进行了定量分析。结果表明:当激光功率达到某一阈值时,非晶硅样品发生了晶化,即由非晶硅转化成了结晶硅,特征峰发生了46.8 cm-1的位移,薄膜的结晶性质发生根本变化。而结晶硅样品在激光功率变化过程中仅因能量积聚造成了薄膜内应力变化,激光能量消散后内应力恢复原来的状态,特征峰在±5.4 cm^(-1)位移内波动,薄膜的结晶性质并未发生明显变化,表明薄膜处于稳定的晶态结构。For inspection of amorphous silicon thin films and crystalline silicon thin films＇ Raman spectra,we used plasma enhanced chemical vapor deposition（ PECVD） to grow amorphous silicon（ α-Si） thin film on the glass substrates,then used excimer laser crystallization to obtain crystalline silicon（ nc-Si） thin film. After growth,micro laser Raman spectrometer was employed to analyze the Raman effects and quantitative crystal quality of amorphous silicon thin film and crystalline silicon thin film. The Raman instrument was used of 532 nm laser at the same point on the thin films for different power intensity irradiation,and the laser irradiation power was followed from low to high and then from high to low,in order to inspect the Raman peaks＇ variation. The results show that when the laser power reaches a certain threshold,the amorphous silicon samples would be crystallized,namely non-crystal silicon film transfers into crystalline silicon film,and the Raman peaks shift in the range of 46. 8 cm- 1,and fundamental changes occur in the amorphous film. The phenomenon can be explained by the principle of ELA. On the other hand,crystalline samples only possess the films＇ stress variety because of laser energy accumulation as the laser power from low to high.After the laser energy is dissipated,the stress restores to its original state. The crystalline nature of nc-Si thin film doesn＇t change significantly,and the Raman peaks retain almost unchangeable within the range of 5. 4 cm- 1,it indicates that films are in stable crystal structures.

关 键 词：非晶硅薄膜 结晶硅薄膜 准分子激光晶化 拉曼光谱 拉曼位移 

分 类 号：TN386.1[电子电信—物理电子学] O484.4[理学—固体物理]