不同干涉仪检测光学元件功率谱密度的比较  

Comparison Among Different Interferometers for Measuring Power Spectral Density of Optical Elements

作　　者：杨相会 沈卫星[1] 张雪洁[1] 马晓君[1] 

机构地区：[1]中国科学院上海光学精密机械研究所高功率激光物理国家实验室,上海201800 [2]中国科学院大学,北京100049

出　　处：《中国激光》2016年第9期112-119,共8页Chinese Journal of Lasers

摘　　要：为了探究不同干涉仪对中频误差的响应规律,获得相对真实的功率谱密度(PSD)分布,分别利用4D AccuFiz、ZYGO DynaFiz以及ZYGO GPI三台干涉仪检测周期性波纹和划痕样品,并对一维实测PSD曲线进行对比分析。结果表明,不同干涉仪对中高频信息的响应度不同;干涉仪分辨率越高,响应度越高。利用仪器传递函数(ITF)曲线对实测PSD分布进行了修正,获得了较为真实的PSD分布。在某些频率范围内,标定的ITF曲线和实际响应仍存在差异。In order to investigate the response law of different interferometers to the mid-spatial frequency errors andobtain the relatively true power spectral density （PSD） distribution, the 4D AecuFiz, ZYGO DynaFiz and ZYG0GPI interferometers are respectively used to measure the periodic ripples and scratch samples, and the comparativeanalysis of the measured one-dimension PSD curves is made. The results show that the responsivities to the mid-and high-spatial frequency information are different for different interferometers, and the higher the interferometerresolution is, the higher the responsivity is. The instrument transfer function （ITF） curve is used to correct themeasured PSD, and the truer PSD distribution is obtained. However, in the range of some frequency bands, therestill exist some difference between the ITF curve and the practical response.

关 键 词：测量 功率谱密度 干涉仪 中频波面误差 仪器传递函数 

分 类 号：TH741[机械工程—光学工程]