热隔离式MEMS气体流量传感器的设计及标定  

Design and Calibration of Thermal Isolated MEMS Gas Flow Sensor

作　　者：谷永先[1] 邬林[1] 曾鸿江[1] 胡娜娜[1] 钱江蓉[1] 

机构地区：[1]中国电子科技集团公司第三十八研究所微电子封装研究中心,安徽合肥230000

出　　处：《仪表技术与传感器》2016年第8期18-20,共3页Instrument Technique and Sensor

摘　　要：设计了一种数字输出热隔离式MEMS气体质量流量传感器,芯片加热电阻与测温电阻完全热隔离,流量值采用UART串口输出。分析了恒温差电路、上下游测温电路、HX711模数转换电路及STC15W408AS单片机电路的设计。针对制造中存在的性能差异,设计了适用于批量制造的标定方法。测试结果表明:传感器具有平滑的输出特性,经过标定后,具有较高的一致性及重复性,适合于工业等领域。A digital output thermal isolated MEMS gas mass flow sensor was designed,the chip heating resistor and temperature measurement resistors were totally thermal isolated,and the flow value was outputted by UART serial port.The constant temperature difference circuit,upstream and downstream temperature measurement circuit,HX711 analog-to-digital conversion circuit,and STC15W408 AS microcontroller circuit were analyzed.According to the performance difference existed in the manufacturing,calibrating method which can be used in mass production was designed.The experiment shows that the sensor has a smooth output characteristic,and high consistency and repeatability after calibration,so it is suitable for industrial fields and so on.

关 键 词：微机电系统 数字输出 热隔离 气体质量流量 标定 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]