翘曲状态下硅微悬臂梁固有频率的变化规律  

Change regulation of natural frequencies for silicon microcantilever under the curvature status

作　　者：杨一柳[1] 佘东生[2] 于震[2] YANG Yi - liu SHE Dong - sheng YU Zhen(Research and Teaching Institute of College Basics, Bohai University, Jinzhou 121013, China College of Engineering, Bohai University, Jinzhou 121013, China)

机构地区：[1]渤海大学大学基础教研部,辽宁锦州121013 [2]渤海大学工学院,辽宁锦州121013

出　　处：《渤海大学学报（自然科学版）》2016年第3期271-277,共7页Journal of Bohai University:Natural Science Edition

基　　金：国家自然科学基金项目(No:51305191);辽宁省教育厅一般项目(No:L2015009)

摘　　要：为了研究微悬臂梁的翘曲状态对其固有频率的影响,使用有限元分析的方法对小长宽比和大长宽比两种结构尺寸的硅微悬臂梁在不同曲率半径下的前五阶模态固有频率进行了仿真分析.结果表明,翘曲对小长宽比硅微悬臂梁固有频率的影响很小;而对于大长宽比的硅微悬臂梁,当曲率半径为1 mm时,其第1阶,第2阶,第3阶,第5阶模态固有频率的变化率分别为1%,26%,40%和15.8%,当曲率半径为3 mm时,其第4阶模态固有频率变化率为13.7%,可见翘曲对大长宽比硅微悬臂梁固有频率的1阶模态固有频率的影响很小,而对第2、第3、第4和第5阶模态固有频率的影响则十分明显.To study the effect of curvature on the natural frequencies of microcantilvers , the finite element a-nalysis method was used to obtain the first five modal natural frequencies of silicon microcantilevers with different radiuses of curvature .Two kinds of microcantilevers were analyzed , the microcantilever with large ratio of length to width and the microcantilever with small ratio of length to width .The results show that the effect of curvature on the natural frequencies of microcantilver with small ratio of length to width can be neglected .But for micro-cantilever 2#, the change ratios of the first , the second , the third and the fifth natural frequencies are 1%, 26%, 40%and 15.8%respectively when the radius of curvature was equal to 1 mm.The change ratio of the fourth natural frequency microcantilever 2#is 13.7%when the radius of curvature was equal to 3 mm.It can be seen that for the microcantilever with large ratio of length to width , there is no obvious effect on its first order nat-ural frequency , but great influence on the second , the third, the fourth and the fifth natural frequencies .

关 键 词：微悬臂梁 翘曲 固有频率 有限元分析 曲率半径 

分 类 号：O242.21[理学—计算数学]