非线性振动条件下估算谐振梁品质因数  

Quality factor estimates of resonant beams with nonlinear vibrations

作　　者：严斌[1] 刘云峰[1] 董景新[1] YAN Bin LIU Yunfeng DONG Jingxin(State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China)

机构地区：[1]清华大学精密仪器系,精密测试技术及仪器国家重点实验室,北京100084

出　　处：《清华大学学报（自然科学版）》2016年第10期1055-1060,共6页Journal of Tsinghua University(Science and Technology)

基　　金：总装“十二五”预研项目(20114113015)

摘　　要：硅微谐振式加速度计在真空封装后出现非线性振动,导致测量品质因数的常规方法失效。为了能对真空封装的加速计进行精确监测,提出了一种品质因数测量方法。该方法基于谐振梁的非线性振动模型,通过将扫频数据按照模型公式拟合得到品质因数,适用于非线性振动时的情况。利用谐振式加速度计进行实验,验证了该方法的一致性和准确性,测得加速度计品质因数均在2×105以上。使用该方法对真空封装的气压与品质因数的关系进行了研究,表明真空封装的气压保持在0.1Pa左右;并对真空封装进行了温度实验和长期跟踪,证明了真空封装的可靠性。Vacuum resonant accelerometers have nonlinear sweeping frequency response, so the regular method cannot be used to measure the quality factor. A nonlinear model of the resonant beam is used here to monitor the effect of the vacuum package. The system calculates the quality factor through fitting the sweeping frequency data for the nonlinear vibrations. Tests on a resonant accelerometer verify the consistency and accuracy of the method. The measured quality factors of the accelerometers are all above 2 ×105. In addition, this method is also used to measure the relationship between the pressure and the quality factor, which indicates that the pressure inside the vacuum package is about 0. 1 Pa. The temperature tests and long-term monitoring tests show the reliability of the vacuum packaging.

关 键 词：谐振加速度计 非线性振动 品质因数 真空封装 

分 类 号：TH824.4[机械工程—仪器科学与技术]