驱动与检测双差动硅微陀螺结构设计和分析  

Structure Design and Analysis of Driving and Sensing Dual-differential Silicon Micro Gyroscope

作　　者：刘悦琛 陈志勇[1] 

机构地区：[1]清华大学精密仪器系,北京100084

出　　处：《自动化与仪表》2016年第10期14-18,共5页Automation & Instrumentation

摘　　要：该文设计了一种驱动轴和检测轴双向差动且双向解耦的硅微机械线振动陀螺。用Ansys有限元分析软件对陀螺敏感结构的振动模态进行了动力学仿真,结果表明该设计可以实现驱动轴和检测轴的双差动振动模态及解耦。理论分析了陀螺的动力学模型,建立了陀螺具有多自由度耦合特性的动力学方程,导出了驱动-检测耦合传递函数,提出了能够反映在工作频率处驱动-检测的综合耦合系数。对加工的微陀螺敏感结构,分别在大气压和100 Pa真空下测试了驱动轴、检测轴和驱动-检测耦合频率响应特性。测试数据验证了刚度耦合参数的一致性。Designs a new silicon micro vibration gyroscope,of which the driving axis and sensing axis are differential and decoupled. By using the finite element software Ansys to operate dynamic simulation of the working mode frequency of the structure,proving that this design can realize the complete decoupling between drive mode and sense mode. Theoretically analyzed the dynamic model of the gyro,then built the coupling characteristic equation with multi-degree of freedom. The equation derives the transfer function between drive mode and sense mode,and reflects the complex coupling coefficient of the gyro working under the drive mode frequency. Tests the micro gyroscope samples with the independent and coupling response of drive axis and sense axis under atmospheric pressure and100 Pa. The test data verifies the consistency of the stiffness and damping coupling coefficient.

关 键 词：微机械陀螺 双差动 结构解耦 刚度耦合 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TH824.3[机械工程—仪器科学与技术]