微纳尺度TiN多层薄膜/涂层力学性能研究进展  

Latest Progress in Mechanical-Property Improvement by Surface Modification with TiN Micro and Nano Multilayers

作　　者：靳巧玲 王海斗[2] 李国禄[1] 张建军[1] 刘金娜[3,2] Jin Qiaoling Wang Haidou Li Guolu Zhang Jianjun Liu Jinna(School of Materials Science and Engineering, Hebei University of Technology, Tianjin 300130, China National Key Lab for Remanufaeturing ,Academy of Armored Forces Engineering, Beijing 100072, China College of Materials Science and Chemical Engineering, Harbin Engineering University, Harbin 150001, China)

机构地区：[1]河北工业大学材料科学与工程学院,天津300130 [2]装甲兵工程学院装备再制造技术国防科技重点实验室,北京100072 [3]哈尔滨工程大学材料科学与化学工程学院,哈尔滨150001

出　　处：《真空科学与技术学报》2016年第10期1085-1091,共7页Chinese Journal of Vacuum Science and Technology

基　　金：北京市自然科学基金重大项目(3120001);国家973计划(2011CB013405);国家杰出青年科学基金项目(51125023);国家自然科学基金项目(51275151)资助支持

摘　　要：TiN纳米多层薄膜/涂层由于其高的硬度、耐磨性和断裂韧性等优点在精密刀具和模具方面备受青睐。近些年TiN纳米多层薄膜在力学性能方面的研究主要集中于超硬性能、摩擦磨损性以及断裂韧性三个方面。本文分别从膜层间作用关系、微观结构以及裂纹扩展机制等角度讨论多层构造对薄膜的超硬性能、耐磨性性以及断裂韧性的影响机理。提出超硬机理指导薄膜制备,残余应力影响裂纹的双重效应,建立多层微观结构与宏观力学性能映射关系三个研究方向,以期为研究TiN纳米多层薄膜力学性能提供新思路。另外,简单介绍了多层结构能够提升薄膜的高温抗氧化性和耐腐蚀性,并展望了TiN纳米多层膜的发展方向。The latest advance in surface modification with TiN micro and/or nano muhilayers was tentatively reviewed. First, the hot-spot research projects on the mechanical property improvements, including the super hard- ness, wear-resistance ,fracture-resistance, as well as the resistances against oxidation and corrosion at high tempera- tures, were introduced. Next, the controversial mechanisms, responsible for the enhancements of hardness, wear re- sistance and crack toughness of the TiN multilayer, were summarized by analyzing the results reported in literature. Finally, the in-depth theoretical studies at nano or atomic scales were proposed, including but not limited to i） the mechanism explaining the enhancement of hardness ; ii） the impact of the residual stress on the formation and propa- gation of cracks ; and iii） the influence of the interface microstructures and phase-structures, such as defects, grain boundaries, lattice mismatching and distortion, on the improved mechanical behavior. The development trends of the TiN muhilayered coatings were also briefly discussed.

关 键 词：TIN 纳米多层薄膜 超硬机理 超硬性 摩擦磨损 断裂韧性 

分 类 号：TG113.25[金属学及工艺—物理冶金] TG174.44[金属学及工艺—金属学]