PIII中工作气压和占空比优化关系的数值研究  

Modeling and Numerical Calculation of Impact of Pressure and Duty-Cycle on Surface Modification by Plasma Immersion Ion Implantation

作　　者：李义[1] 敬晓丹[1] 李久会[1] 雷明凯[2] Li Yi Jing Xiaodan Li Jiuhui Lei Mingkai(School of Science, Liaoning University of Technology, Jinzhou 121001, China Surface Engineering Laboratory, School of Materials science and Engineering, Dalian University of Technology, Dalian 116024, China)

机构地区：[1]辽宁工业大学理学院,锦州121001 [2]大连理工大学材料科学与技术学院表面工程研究室,大连116024

出　　处：《真空科学与技术学报》2016年第10期1162-1168,共7页Chinese Journal of Vacuum Science and Technology

基　　金：辽宁省教育厅科学研究一般项目(2015233);辽宁工业大学教师科研启动基金项目(201320)

摘　　要：等离子体浸没离子注入中的等离子体扩散过程和鞘层演化行为分别由低压非稳态扩散流体模型与鞘层碰撞流体模型来进行描述,数值模拟研究了工作气压与占空比对离子注入剂量和能量的影响。计算结果表明,工作气压不变时,随占空比变化,一定时间内的离子注入剂量有极大值,并且极大值对应的占空比会随着工作气压降低而减小。工作气压较高时,占空比越小离子碰撞能量越高;而工作气压较低时,占空比越大离子碰撞能量越高。相同工作气压下占空比对离子注入剂量的影响要比离子碰撞能量显著。The plasma diffusion and sheath evolution, in surface modification by plasma immersion ion implan- tation（ PIII）, were mathematically formulated with the low pressure non-steady diffusion fluid and collision fluid models and theoretically analyzed by numerically solving the equations. The influence of the pressure and duty-cycle of the pulsed bias on the dosage and ion impact energy was investigated. The calculated results show that the pres- sure and duty-cycle significantly affects the dosage and energy of the implanted ions. For example, as the duty-cycle increases at given pressures （0.5,0.1 and 0.02 Pa） ,the highest ion current decreases,accompanied by decreases of recovery proportion. For a certain time, the dosage peaks at the duty-cycle which decreased with a decreasing pressure. At a high （low） pressure,the ion impact energy increases with a decrease （ an increase） of the duty-cy- cle. At a fixed pressure, the ion-implantation dosage depends more strongly on the duty-cycle than on the ion impact energy.

关 键 词：等离子体浸没离子注入 多脉冲鞘层 流体模型 工作气压 占空比 

分 类 号：O539[理学—等离子体物理]