GaN基微腔传感器悬空隔膜的力电转换的ANSYS研究  

ANSYS analysis of force-electric conversion of floating diaphragm for GaN-based micro-cavity sensors

作　　者：朱彦旭[1] 杜志娟[1] 刘飞飞[1] 于宁[1] 王岳华[1] 宋会会[1] 王红航[2] 

机构地区：[1]北京工业大学北京光电子技术实验室,北京100124 [2]电子科技大学中山学院电子薄膜与集成器件国家重点实验室,中山528400

出　　处：《激光技术》2016年第6期791-795,共5页Laser Technology

基　　金：国家科技支撑计划资助项目(2011BAE01B14);北京市15青年拔尖基金资助项目(311000543115501);中山市科技计划资助项目(2014A2FC305);科研基地建设基金资助项目(PXM2014-014204-500008)

摘　　要：为了深入研究氮化镓薄膜的压电效应和机械特性,基于气体直接吸收红外辐射的原理,将基于氮化镓悬空隔膜的充气微腔红外传感器项目作为背景,以氮化镓/铝镓氮薄膜作为敏感单元,在材料力学以及压电效应方面,采用有限元分析软件ANSYS 14.0进行了理论分析和验证,取得了薄膜形状、厚度和面积等尺寸与压电薄膜输出电压以及薄膜灵敏度的逻辑关系数据,验证了薄膜力-电信号转换机制可行性。结果表明,GaN薄膜材料具有良好的压电特性以及线性度,有助于对探测器输出信号进行准确的预测,并进行温度补偿,突出GaN材料在应用中的优势。此研究对设计性能良好、灵敏度高的微腔红外传感器是有帮助的。In order to figure out piezoelectric effect and mechanical properties of GaN film, a physics-based model was proposed in this study. Based on the theory that gas absorbed infrared directly, micro-cavity infrared sensor with GaN/AlGaN floating membrane was put as background and AlGaN/GaN floating membrane was put as sensitive element. After theoretical analysis and experimental verification of materials mechanics and piezoelectric effect by using finite element analysis software ANSYS 14. 0, datas of the logical relationship between output voltage, membrane sensitivity and shapes, thickness, area were gotten, and the feasibility of membrane force-electric signal conversion mechanism was verified. The results show that GaN film has good piezoelectric performance and linearity which make a good contribution to forecast the sensor output signal accurately and make temperature compensation. The proposed model is useful to make a theoretical foundation for better design of micro cavity infrared sensor with good performance and high sensitivity.

关 键 词：薄膜 输出电压 ANSYS 14. 0 机械应力 压电效应 

分 类 号：O484.4[理学—固体物理] TP212.14[理学—物理]