空间分辨率对半导体器件光学测温结果的影响  

Influence of Spatial Resolution on Optical Temperature Measurement Results of Semiconductor Devices

作　　者：翟玉卫[1] 梁法国[1] 刘岩[1] 郑世棋[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《红外》2016年第11期36-41,共6页Infrared

摘　　要：从空间分辨率的定义出发,指出物镜的数值孔径和光的波长是决定光学仪器空间分辨率的主要因素。给出了空间分辨率影响半导体器件结温检测结果准确度的原理。对GaN HEMT进行了不同空间分辨率下的显微红外温度检测,较低空间分辨率下的测温结果低于高空间分辨率下的测温结果,证明空间分辨率的不足会导致温度测量结果偏低。From the definition of spatial resolution, it is pointed out that the numerical aperture of an objective lens and the wavelength of light are the main factors for determining the spatial resolution of optical instruments. The principle that the spatial resolution affects the measurement accuracy of the junction temperature of semiconductor devices is given. Microscopic infrared temperature detection is conducted on GaN HEMTs at different spatial resolution. The temperature measurement results obtained at lower spatial resolution are less accurate than those obtained at high spatial resolution. This shows that insufficient spatial resolution may result in less accurate temperature measurement results.

关 键 词：空间分辨率 数值孔径 温度检测 半导体器件 

分 类 号：TN303[电子电信—物理电子学]