基于TDC的纳米级位移测量方法及其误差分析  

A TDC-based method for nano-scale displacement measurement and its error analysis

作　　者：邓露[1] 周超[2] 曹志强[2] 王硕[2] 谭民[2] 

机构地区：[1]中央财经大学统计与数学学院,北京100081 [2]中国科学院自动化研究所,北京100190

出　　处：《中国科学：信息科学》2016年第11期1662-1675,共14页Scientia Sinica(Informationis)

基　　金：国家自然科学基金(批准号:61473295;61528304;71401189);北京市自然科学基金(批准号:4152054)资助项目

摘　　要：纳米测量技术和测量装置的不断创新与进步将带动纳米技术的快速发展.微观操作的重要的基础之一就是微纳尺度位移的精确的测量.本文针对在电子扫描显微镜真空腔中工作的微纳操作机器人的末端运动测量问题,采用时间–数字转换(time-digital covertor,TDC)方法,测量通过电阻应变片给标准电容充电放电的时间来计算其应变量,进而计算其位移.进一步分析了本方法的误差传递和系统耗散功率,并与传统的惠斯通电桥方法进行了比较,可以得出本方法在误差优化的同时,耗散功率有极大的降低,对于真空中散热困难的操作条件下,有较大的优势.对传感的漂移、精度、分辨率和线性等问题进行测试,并对系统进行闭环控制和重复微观单元测试等应用演示,证明方法的有效性.The innovation and improvement of nano-scale measurement methods and devices are driving the rapid development of nano-technology.One of the most important foundations of micro-manipulation is the accurate measurement of micro-and nano-displacement.This paper focuses on the measurement of end effectors for a nano-manipulation robot,which operates in the vacuum chamber of a scanning electron microscope.A standard capacitor is charged and discharged through a strain gauge,and the time is measured by a time-digital convertor to calculate the displacement.The error and power consumption are analyzed and compared with a traditional Wheatstone bridge.The power consumption is greatly reduced by optimizing the error;thus,it takes advantage of the vacuum environment,in which heat dissipation is difficult to achieve.The drift,precision,resolution,and linearity are tested,and demos of closed-loop control and repeated micro-unit probing are provided to verify the validity of this method.

关 键 词：纳米位移 误差分析 时间 – 数字转换(TDC) 位移测量 漂移 

分 类 号：TN16[电子电信—物理电子学]