一种高电场激励效率的石英谐振元件设计  

Design of Quartz Resonator With High Electric Field Excitation Efficiency

作　　者：林丙涛[1,2,3] 林日乐[1,2,3] 林朝营 赵建华[1,2,3] 李文蕴[1,2,3] 

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]重庆市固态惯性技术企业工程技术研究中心,重庆401332 [3]重庆市固态惯性技术工程实验室,重庆401332 [4]重庆通信学院,重庆400035

出　　处：《压电与声光》2016年第6期840-842,共3页Piezoelectrics & Acoustooptics

基　　金：重庆市青年科技人才培养计划基金资助项目(cstc2014kjrc-qnrc40003)

摘　　要：设计了一种谐振梁为双"W"截面形状的石英音叉谐振元件,通过在梁表面凹槽的两端设置深凹槽,有效提高了凹槽侧壁的陡直性,进而提高了电场的激励效率。经仿真对比,相对于"H"形截面的谐振元件,双"W"形截面的谐振元件的压电激励力提高约58%。设计了元件芯片工艺方案,并在直径50cm的晶片上制作出两种截面形状的谐振元件。测试结果表明,双"W"形截面的谐振元件的品质因数(Q)值和导纳分别由2 387、2 143ns提高至2 648、2 346ns,动态阻抗值由548kΩ降至417kΩ。According to the anisotropic etching characteristics of quartz crystal, a novel micro-resonator with two double W-shaped cross-section beams was designed. The side well gradient was improved by setting two deep grooves on both sides of the grooves to improve the electric field excitation efficiency. The simulation result showed that the piezoelectric force was improved by 58% comparing to the resonator with two H-shaped cross-section beams. Two kinds of resonators were successfully manufactured on a quartz crystal wafer with diameter of Φ50 cm. The experimental results showed that the Q factor and admittance of the new resonator were increased from 2 387, 2 143 ns to 2 648,2 346 ns, respectively, and the motional impedance was decreased from 548 kΩ to 417 kΩ.

关 键 词：石英 谐振器 凹槽 电场激励效率 动态阻抗 品质因数(Q) 

分 类 号：TN384[电子电信—物理电子学] TN75