前驱液中Er^(3+)离子对ZnO薄膜形貌、结构和光学性质的影响  

Effect of Er^(3+) ions on the morphology,structure and optical properties of ZnO thin films

作　　者：孙景昌[1] 郎月怡 张曦文[1] 高瑞雪[1] 李沛达 马章微 李成仁[1] 王玉新[1] 

机构地区：[1]辽宁师范大学物理与电子技术学院,辽宁大连116029

出　　处：《辽宁师范大学学报（自然科学版）》2016年第4期482-488,共7页Journal of Liaoning Normal University:Natural Science Edition

基　　金：辽宁省自然科学技术基金资助项目(201602455);辽宁省教育厅科学研究一般项目(L2015292;L201683665)

摘　　要：利用超声喷雾热解法,研究了Zn(CH3COO)2·2H2O的浓度、生长温度及前驱液中Er^(3+)离子对ZnO薄膜形貌、结构和光学性质的影响.扫描电子显微镜测试表明,前驱液中未加入Er^(3+)离子时,所制备的ZnO薄膜呈现团簇状结构.随着Zn(CH3COO)2·2H2O的浓度的增加,ZnO薄膜中团簇状结构的尺寸逐渐变大.前驱液中加入Er^(3+)离子后制备的ZnO薄膜均呈现片状结构,随着Zn(CH3COO)2·2H2O的浓度的增加,其片状结构的尺寸也逐渐变大.X射线衍射测试结果表明,前驱液中Er^(3+)离子的加入改善了ZnO薄膜的结晶质量.光致发光测试结果表明,所有样品中均出现了一个位于380nm附近的近带边(NBE)发射峰,和一个位于550~650nm的深能级(DL)发射峰.前驱液中Er^(3+)离子的加入使得ZnO薄膜中的NBE/DL比值有所提高,改善了ZnO薄膜的光学性质.ZnO thin films are grown by the process of Ultrasonic Spray Pyrolysis（USP）.The influence of solution concentration,growth temperature and Er3＋ions in growth liquid on the structure,morphology and optical properties of ZnO thin films by the process of USP were investigated systemically.Scanning electrical microscope results indicate that ZnO thin films are clusters without Er3＋ions in growth liquid.As the solution concentration become larger,the size of ZnO increase.The ZnO thin films grown with Er3＋ions all present lamellar structure.And also as the solution concentration become larger,the size of ZnO increase.X-ray diffraction measurements show that the ZnO thin films with Er3＋ions in growth liquid have the better crystallization quality.Photoluminescence results show that all samples emerge a NBE peak near 380 nm,and a DL peak in 550-650 nm,the NBE/DL ratio of the ZnO thin films are all increased and have better optical properties comparing to the ZnO thin films which are prepared without Er3＋ions.

关 键 词：ZNO薄膜 超声喷雾热解 Zn(CH3COO)2·2H2O的浓度 生长温度 Er3+离子 

分 类 号：TB34[一般工业技术—材料科学与工程]