高性能光学合成石英玻璃的制备和应用  

Preparation and application of high-performance synthetic optical fused silica glass

作　　者：聂兰舰[1] 王玉芬[1] 向在奎[1] 王蕾[1] 王慧[1] 

机构地区：[1]中国建筑材料科学研究总院石英与特种玻璃研究院,北京100024

出　　处：《光学精密工程》2016年第12期2916-2924,共9页Optics and Precision Engineering

基　　金：国家国际科技合作专项资助项目(No.2012DFA51310);中国建筑材料科学研究总院前沿探索基金资助项目(No.YT-112)

摘　　要：介绍了制备光学合成石英玻璃的常用工艺方法,包括化学气相沉积、等离子化学气相沉积和间接合成法等;给出了不同光学石英玻璃使用的原材料、它们的特点及其在不同领域的应用综述了该项技术在国内外的发展现状。比较了上述制备方法的优缺点,其中立式化学气相沉积工艺是目前最成熟的商业化工艺,可用于制备直径达Φ600mm以上、光学均匀性优于2×10^(-6)、抗激光损伤阈值达30J/cm2@355nm的大尺寸合成石英玻璃;等离子化学气相沉积工艺可制备内在质量优异、羟基含量≤5×10^(-6)、光谱透过率T190-4000nm≥80%的全光谱透过石英玻璃;间接合成法可制备光吸收系数小于1×10^(-6)/cm@1064nm、羟基含量≤1×10^(-6)、光谱透过率T157-4000nm≥80%的石英玻璃,而且易于掺杂及控制缺陷,进而制备各类掺杂特殊功能的石英玻璃。文章最后指出:上述制备工艺各有优缺点,应根据高端光电技术领域的应用需求采取适当的制备工艺。Several kinds of important preparation processes of synthetic optical silica glass are elabora- ted, such as Chemical Vapor Deposition （CVD）, Plasma Chemical Vapor Deposition （PCVD） and in- direct synthetic method. The raw materials and characteristics for the optical silica glass, as well their applications in different fields are given. Then, developing situations and tendencies of these prepara- tion processes are reviewed. It compares their advantages and shortcomings in detail. Among them, the CVD is the most mature and commercial technology. It prepares the synthetic silica glass with a diameter of 600 mm or beyond, its optical uniformity is better than 2 × 10-6 , and the laser damage threshold is 30 J/cm2@355 nm. The PCVD processes synthetic silica glass of full-spectrum transmit- tance. It shows excellent internal quality, its hydroxyl content is less than 5 × 10 6, and the spectral transmittance of 7190-4000 am is more than 80 %. Furthermore, the indirect synthetic method prepares the synthetic silica glass with an absorption coefficient less than 1 × 10-6/cm@1064 nm, its hydroxyl con-tent is less than 1 × 10-6 , and the spectral transmittance of T157-4000nm is more than 80%. Moreover, the indirect synthetic method is beneficial to doping and controlling the defects of synthetic silica glass, which achieves all kinds of special functional silica glass. It suggests that each of these prepara- tion processes of synthetic optical silica glass has its own advantages and disadvantages, so proper preparation processes could be adopted for different application requirements of modern high-end pho- toelectron technological fields.

关 键 词：光学石英玻璃 化学气相沉积 等离子化学气相沉积 间接合成法 综述 

分 类 号：TQ171.731[化学工程—玻璃工业]