大口径平面光学元件的磁流变加工  

Magnetorheological processing for large aperture plane optical elements

作　　者：侯晶[1,2] 王洪祥[1] 陈贤华[2] 谢瑞清[2] 邓文辉[2] 唐才学[2] 

机构地区：[1]哈尔滨工业大学,黑龙江哈尔滨150001 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《光学精密工程》2016年第12期3054-3060,共7页Optics and Precision Engineering

基　　金：科学挑战专题资金资助项目(No.JCKY2016212A506-0502)

摘　　要：为了实现大口径平面光学元件的高精度加工,开展了磁流变加工技术的研究。介绍了磁流变加工原理及去除函数的数学模型。根据磁流变加工的特点,建立了元件整体加工的工艺流程,给出了元件加工的工艺要素。然后,开发了抛光斑的提取软件,并基于轨迹段划分的速度模式开发了工艺软件,分析了工艺软件的各项功能模块。最后,基于元件加工的工艺流程,对一件800mm×400mm的元件进行了加工实验。利用检测设备测得了元件的低、中、高频的加工指标,其低频反射波前PV值为34nm,中频波前功率谱密度(PSD1)值为1.7nm,高频粗糙度Rq值为0.27nm。实验显示了较好的实验结果,验证了利用磁流变加工技术实现了大口径光学元件的高精度加工的可行性。本文还阐述了磁流变加工技术在高功率激光元件中应用的优点。The magnetorheological processing was investigated to improve the machining precision of large aperture optical elements. The principle of magnetorheological processing and the mathematical model of removal function were introduced. On the basis of the characteristics of the magneticrheolog- ical processing, the whole processing flow of optical elements was established and the technological factors of element process were given. Then, the software for extracting laser spots was developed, the technological software was also proposed based on the orbit segment divided speed mode and func- tions of modules in the technological software were analyzed. Finally, an element with a length of 800 mm and a width of 400 mm was machined experimentally. The results in low, middle and high fre- quencies by a test equipment show that the PV value of reflective wavefront in low frequency is 34 nm, the PSDl（power spectrum density）value is 1.7 nm, and the roughness Rq value is 0.27 nm, respectively. These experimental results verify that it is feasible to machine the high precise large aper ture optical elements by magnetorheological processing. Moreover, this paper expounds the advanta ges of magnetorheological processing in high power laser component applications.

关 键 词：平面光学元件 磁流变加工 抛光 面形精度 高功率激光器 

分 类 号：TN305.2[电子电信—物理电子学] TH703[机械工程—仪器科学与技术]