45nm芯片铜互连结构低k介质层热应力分析  

Thermal Stress Analysis for the Low-k Dielectric Layers of Cu Interconnects in a 45 nm Chip

作　　者：林琳[1] 王珺[1] 王磊 张文奇 

机构地区：[1]复旦大学材料系,上海200433 [2]华进半导体封装先导技术研发中心有限公司,江苏无锡214135

出　　处：《半导体技术》2017年第1期55-60,共6页Semiconductor Technology

基　　金：国家科技重大专项资助项目(2014ZX02501)

摘　　要：采用铜互连工艺的先进芯片在封装过程中,铜互连结构中比较脆弱的低介电常数(k)介质层,容易因受到较高的热机械应力而发生失效破坏,出现芯片封装交互作用(CPI)影响问题。采用有限元子模型的方法,整体模型中引入等效层简化微小结构,对45 nm工艺芯片进行三维热应力分析。用该方法研究了芯片在倒装回流焊过程中,聚酰亚胺(PI)开口、铜柱直径、焊料高度和Ni层厚度对芯片Cu/低k互连结构低k介质层应力的影响。分析结果显示,互连结构中间层中低k介质受到的应力较大,易出现失效,与报道的实验结果一致;上述四个因素对芯片低k介质中应力影响程度的排序为:焊料高度>PI开口>铜柱直径>Ni层厚度。The fragile low-k dielectric layers of Cu interconnects in an advanced chip are prone to failure damage due to the higher thermomechanical stress during the chip packaging, resulting in a problem of the chip package interaction （CPI）. The 3D thermal stress analysis for a 45 nm chip was per- formed by the finite element method with sub-modeling technology and the interconnects were simplified as an effective thin layer in the global model. The effects of PI opening, copper pillar diameter, solder height and Ni-layer thickness on the stress in the low-k dielectric layers of Cu/low-k interconnects during the flip-chip reflow process of the chip were studied by this method. The analysis results show that the stress of the low-k dielectric in the middle layers of interconnects is in high failure risk due to the relative- ly higher stress, which is consistent with the reported experimental results. The effects of the four factors on the stress in low-k layers can be ranked as ： solder height 〉 PI opening 〉 copper pillar diameter 〉 Ni- layer thickness.

关 键 词：芯片封装交互作用(CPI) 有限元分析 低介电常数介质 子模型 热机械应力 45 nm芯片 

分 类 号：TN405.97[电子电信—微电子学与固体电子学]