压电偏摆台的复合控制  

Compound Control of Piezoelectric Oscillating Table

作　　者：张东岳[1,2] 王伟国[1] 张振东[1] 李博[1] 陈健[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学研究生院,北京100039

出　　处：《压电与声光》2017年第1期40-43,共4页Piezoelectrics & Acoustooptics

基　　金：吉林省重大科技攻关专项基金资助项目(No.20126015)

摘　　要：由于压电陶瓷具有迟滞效应,为了更好地控制压电偏摆台,减少迟滞效应对控制系统的影响,首先通过坐标变换对偏摆台建立了Prandtl-Ishlinskii(PI)迟滞模型,然后求解其逆模型,并设计前馈控制器,使输入、输出角度间具有较好的线性关系。最后在此基础上进行比例-积分-微分(PID)反馈控制,构成复合控制系统,大幅度提高了定位精度。实验结果表明,最大定位误差为2.2μrad,具有良好的控制效果。Because of the hysteresis effect of piezoelectric ceramic,in order to control the piezoelectric oscillating table better and reduce the influence of the hysteresis effect on the control system,The Prandtl-Ishlinskii(PI)hysteresis model of the oscillating table is established by the transformation of coordinates first.The inverse model of the PI model is solved and the feedforward compensation controller is designed to have a good linearity between the output and the input angels.Finally,on the basis of PI model,the compound control system is built by adding PID feedback controller and the positioning accuracy is improved significantly.The experimental results show that the maximum error of positioning is 2.2μrad and the control effect of system is excellent.

关 键 词：迟滞 压电偏摆台 PI迟滞模型 逆模型 复合控制 

分 类 号：TN304.9[电子电信—物理电子学]